Conferences related to Nanopositioning

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2020 59th IEEE Conference on Decision and Control (CDC)

The CDC is the premier conference dedicated to the advancement of the theory and practice of systems and control. The CDC annually brings together an international community of researchers and practitioners in the field of automatic control to discuss new research results, perspectives on future developments, and innovative applications relevant to decision making, automatic control, and related areas.


2020 American Control Conference (ACC)

The ACC is the annual conference of the American Automatic Control Council (AACC, the U.S. national member organization of the International Federation for Automatic Control (IFAC)). The ACC is internationally recognized as a premier scientific and engineering conference dedicated to the advancement of control theory and practice. The ACC brings together an international community of researchers and practitioners to discuss the latest findings in automatic control. The 2020 ACC technical program will

  • 2019 American Control Conference (ACC)

    Technical topics include biological systems, vehicle dynamics and control, adaptive control, consensus control, cooperative control, control of communication networks, control of networked systems, control of distributed parameter systems, decentralized control, delay systems, discrete-event systems, fault detection, fault-tolerant systems, flexible structures, flight control, formation flying, fuzzy systems, hybrid systems, system identification, iterative learning control, model predictive control, linear parameter-varying systems, linear matrix inequalities, machine learning, manufacturing systems, robotics, multi-agent systems, neural networks, nonlinear control, observers, optimal control, optimization, path planning, navigation, robust control, sensor fusion, sliding mode control, stochastic systems, switched systems, uncertain systems, game theory.

  • 2018 Annual American Control Conference (ACC)

    Technical topics include biological systems, vehicle dynamics and control, adaptive control, consensus control, cooperative control, control of communication networks, control of networked systems, control of distributed parameter systems, decentralized control, delay systems, discrete-event systems, fault detection, fault-tolerant systems, flexible structures, flight control, formation flying, fuzzy systems, hybrid systems, system identification, iterative learning control, model predictive control, linear parameter-varying systems, linear matrix inequalities, machine learning, manufacturing systems, robotics, multi-agent systems, neural networks, nonlinear control, observers, optimal control, optimization, path planning, navigation, robust control, sensor fusion, sliding mode control, stochastic systems, switched systems, uncertain systems, game theory.

  • 2017 American Control Conference (ACC)

    Technical topics include biological systems, vehicle dynamics and control, adaptive control, consensus control, cooperative control, control of communication networks, control of networked systems, control of distributed parameter systems, decentralized control, delay systems, discrete-event systems, fault detection, fault-tolerant systems, flexible structures, flight control, formation flying, fuzzy systems, hybrid systems, system identification, iterative learning control, model predictive control, linear parameter-varying systems, linear matrix inequalities, machine learning, manufacturing systems, robotics, multi-agent systems, neural networks, nonlinear control, observers, optimal control, optimization, path planning, navigation, robust control, sensor fusion, sliding mode control, stochastic systems, switched systems, uncertain systems, game theory.

  • 2016 American Control Conference (ACC)

    Control systems theory and practice. Conference topics include biological systems, vehicle dynamics and control, consensus control, cooperative control, control of communication networks, control of networked systems, control of distributed parameter systems, decentralized control, delay systems, discrete-event systems, fault detection, fault-tolerant systems, flexible structures, flight control, formation flying, fuzzy systems, hybrid systems, system identification, iterative learning control, model predictive control, linear parameter-varying systems, linear matrix inequalities, machine learning, manufacturing systems, robotics, multi-agent systems, neural networks, nonlinear control, observers, optimal control, optimization, path planning, navigation, robust control, sensor fusion, sliding mode control, stochastic systems, switched systems, uncertain systems, game theory.

  • 2015 American Control Conference (ACC)

    control theory, technology, and practice

  • 2014 American Control Conference - ACC 2014

    All areas of the theory and practice of automatic control, including but not limited to network control systems, model predictive control, systems analysis in biology and medicine, hybrid and switched systems, aerospace systems, power and energy systems and control of nano- and micro-systems.

  • 2013 American Control Conference (ACC)

    Control systems theory and practice. Conference themes on sustainability, societal challenges for control, smart healthcare systems. Conference topics include biological systems, vehicle dynamics and control, consensus control, cooperative control, control of communication networks, control of networked systems, control of distributed parameter systems, decentralized control, delay systems, discrete-event systems, fault detection, fault-tolerant systems, flexible structures, flight control, formation flying, fuzzy systems, hybrid systems, system identification, iterative learning control, model predictive control, linear parameter-varying systems, linear matrix inequalities, machine learning, manufacturing systems, robotics, multi-agent systems, neural networks, nonlinear control, observers, optimal control, optimization, path planning, navigation, robust control, sensor fusion, sliding mode control, stochastic systems, switched systems, uncertain systems, game theory.

  • 2012 American Control Conference - ACC 2012

    All areas of control engineering and science.

  • 2011 American Control Conference - ACC 2011

    ACC provides a forum for bringing industry and academia together to discuss the latest developments in the area of Automatic Control Systems, from new control theories, to the advances in sensors and actuator technologies, and to new applications areas for automation.

  • 2010 American Control Conference - ACC 2010

    Theory and practice of automatic control

  • 2009 American Control Conference - ACC 2009

    The 2009 ACC technical program will cover new developments related to theory, application, and education in control science and engineering. In addition to regular technical sessions the program will also feature interactive and tutorial sessions and preconference workshops.

  • 2008 American Control Conference - ACC 2008

  • 2007 American Control Conference - ACC 2007

  • 2006 American Control Conference - ACC 2006 (Silver Anniversary)

  • 2005 American Control Conference - ACC 2005

  • 2004 American Control Conference - ACC 2004

  • 2003 American Control Conference - ACC 2003

  • 2002 American Control Conference - ACC 2002

  • 2001 American Control Conference - ACC 2001

  • 2000 American Control Conference - ACC 2000

  • 1999 American Control Conference - ACC '99

  • 1998 American Control Conference - ACC '98

  • 1997 American Control Conference - ACC '97

  • 1996 13th Triennial World Congress of the International Federation of Automatic Control (IFAC)


2020 IEEE 16th International Workshop on Advanced Motion Control (AMC)

AMC2020 is the 16th in a series of biennial international workshops on Advanced Motion Control which aims to bring together researchers from both academia and industry and to promote omnipresent motion control technologies and applications.


2020 IEEE International Conference on Robotics and Automation (ICRA)

The International Conference on Robotics and Automation (ICRA) is the IEEE Robotics and Automation Society’s biggest conference and one of the leading international forums for robotics researchers to present their work.


2020 IEEE International Conference on Systems, Man, and Cybernetics (SMC)

The 2020 IEEE International Conference on Systems, Man, and Cybernetics (SMC 2020) will be held in Metro Toronto Convention Centre (MTCC), Toronto, Ontario, Canada. SMC 2020 is the flagship conference of the IEEE Systems, Man, and Cybernetics Society. It provides an international forum for researchers and practitioners to report most recent innovations and developments, summarize state-of-the-art, and exchange ideas and advances in all aspects of systems science and engineering, human machine systems, and cybernetics. Advances in these fields have increasing importance in the creation of intelligent environments involving technologies interacting with humans to provide an enriching experience and thereby improve quality of life. Papers related to the conference theme are solicited, including theories, methodologies, and emerging applications. Contributions to theory and practice, including but not limited to the following technical areas, are invited.


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Periodicals related to Nanopositioning

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Automatic Control, IEEE Transactions on

The theory, design and application of Control Systems. It shall encompass components, and the integration of these components, as are necessary for the construction of such systems. The word `systems' as used herein shall be interpreted to include physical, biological, organizational and other entities and combinations thereof, which can be represented through a mathematical symbolism. The Field of Interest: shall ...


Automation Science and Engineering, IEEE Transactions on

The IEEE Transactions on Automation Sciences and Engineering (T-ASE) publishes fundamental papers on Automation, emphasizing scientific results that advance efficiency, quality, productivity, and reliability. T-ASE encourages interdisciplinary approaches from computer science, control systems, electrical engineering, mathematics, mechanical engineering, operations research, and other fields. We welcome results relevant to industries such as agriculture, biotechnology, healthcare, home automation, maintenance, manufacturing, pharmaceuticals, retail, ...


Control Systems Technology, IEEE Transactions on

Serves as a compendium for papers on the technological advances in control engineering and as an archival publication which will bridge the gap between theory and practice. Papers will highlight the latest knowledge, exploratory developments, and practical applications in all aspects of the technology needed to implement control systems from analysis and design through simulation and hardware.


Education, IEEE Transactions on

Educational methods, technology, and programs; history of technology; impact of evolving research on education.


Electron Device Letters, IEEE

Publishes original and significant contributions relating to the theory, design, performance and reliability of electron devices, including optoelectronic devices, nanoscale devices, solid-state devices, integrated electronic devices, energy sources, power devices, displays, sensors, electro-mechanical devices, quantum devices and electron tubes.


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Most published Xplore authors for Nanopositioning

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Xplore Articles related to Nanopositioning

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A Survey of Control Issues in Nanopositioning

IEEE Transactions on Control Systems Technology, 2007

Nanotechnology is the science of understanding matter and the control of matter at dimensions of 100 nm or less. Encompassing nanoscale science, engineering, and technology, nanotechnology involves imaging, measuring, modeling, and manipulation of matter at this level of precision. An important aspect of research in nanotechnology involves precision control and manipulation of devices and materials at a nanoscale, i.e., nanopositioning. ...


SNR improvement in MEMS electrothermal displacement sensors

2014 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, 2014

Electrothermal displacement sensors are doped silicon resistors used for nanopositioning purposes. The displacement precision of the nanopositioners is strongly dependent on the signal to noise ratio (SNR) of the sensors. The sensitivity of the electrothermal sensor is proportional to the temperature of the sensor. However, higher temperature increases the thermal noise of the device. We propose new methods both in ...


Fabrication of microcantilever arrays using sol-gel PZT thin film for nanopositioning

Digest of the Asia-Pacific Magnetic Recording Conference, 2002

Lead zirconate titanate (PZT) piezoelectric thin films have been prepared by the sol-gel method to fabricate microcantilever arrays for nano-actuation with potential applications in hard disk drives. Film annealing temperature and time is critical to the preparation of the sol-gel thin film. The fabrication process of microcantilever arrays in planar structure is presented. Key issues for the fabrication of the ...


Design and experimental performance of a piezoelectric wheelbarrow applicable to the stick-slip motion study

2016 IEEE International Conference on Robotics and Biomimetics (ROBIO), 2016

This paper proposes a piezoelectric wheelbarrow based on stick-slip principle. The mechanical structure and the motion principle are presented. A series of experiments are carried out to investigate the performance of the wheelbarrow and the experimental results indicate that the displacement outputs under various driving voltages and various driving frequencies show good linear relationships with the time. The resolution is ...


A large travel piezoelectric motor nanopositioning system

2010 International Conference on Mechanic Automation and Control Engineering, 2010

A small-sized and large travel nanopositioning system was presented, the actuation characteristic of a piezoelectric motor with multi-claws was analyzed and tested. Considering the influence on nanopositioning of strike force caused by the piezoelectric motor's claws touching the ceramic rod of rotor or reaction force caused by the piezoelectric motor's claws returning with inertia to original point, a smoothing actuation ...


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Educational Resources on Nanopositioning

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IEEE.tv Videos

No IEEE.tv Videos are currently tagged "Nanopositioning"

IEEE-USA E-Books

  • A Survey of Control Issues in Nanopositioning

    Nanotechnology is the science of understanding matter and the control of matter at dimensions of 100 nm or less. Encompassing nanoscale science, engineering, and technology, nanotechnology involves imaging, measuring, modeling, and manipulation of matter at this level of precision. An important aspect of research in nanotechnology involves precision control and manipulation of devices and materials at a nanoscale, i.e., nanopositioning. Nanopositioners are precision mechatronic systems designed to move objects over a small range with a resolution down to a fraction of an atomic diameter. The desired attributes of a nanopositioner are extremely high resolution, accuracy, stability, and fast response. The key to successful nanopositioning is accurate position sensing and feedback control of the motion. This paper presents an overview of nanopositioning technologies and devices emphasizing the key role of advanced control techniques in improving precision, accuracy, and speed of operation of these systems.

  • SNR improvement in MEMS electrothermal displacement sensors

    Electrothermal displacement sensors are doped silicon resistors used for nanopositioning purposes. The displacement precision of the nanopositioners is strongly dependent on the signal to noise ratio (SNR) of the sensors. The sensitivity of the electrothermal sensor is proportional to the temperature of the sensor. However, higher temperature increases the thermal noise of the device. We propose new methods both in the device and the readout circuit to improve the SNR. The design of a multiple sensor architecture is reported in this work. Through experiments we show that with averaging multiple sensor signals the overall SNR is improved by the number of averaged sensor outputs. The experiments are carried out on SOI (Silicon on Insulator) MEMS (Microelectromechanical Systems) nanopositioners. By combining three sensor outputs, we achieved a 4 dB enhancement in SNR. Furthermore, the sensitivity of commonly used Wheatstone bridge and transimpedance amplifier (TA) readout circuits are investigated. We show analytically and experimentally that TA circuit offers four times higher sensitivity.

  • Fabrication of microcantilever arrays using sol-gel PZT thin film for nanopositioning

    Lead zirconate titanate (PZT) piezoelectric thin films have been prepared by the sol-gel method to fabricate microcantilever arrays for nano-actuation with potential applications in hard disk drives. Film annealing temperature and time is critical to the preparation of the sol-gel thin film. The fabrication process of microcantilever arrays in planar structure is presented. Key issues for the fabrication of the cantilever are: the compatible etching process of PZT thin film, and the compensation of thin film stress in all layers to obtain a flat multiple layer structure.

  • Design and experimental performance of a piezoelectric wheelbarrow applicable to the stick-slip motion study

    This paper proposes a piezoelectric wheelbarrow based on stick-slip principle. The mechanical structure and the motion principle are presented. A series of experiments are carried out to investigate the performance of the wheelbarrow and the experimental results indicate that the displacement outputs under various driving voltages and various driving frequencies show good linear relationships with the time. The resolution is 16.64nm and the velocity can reach about 587.246μm/s when the driving frequency is 256Hz and the driving voltage is 80V. The designed wheelbarrow can achieve various velocities by changing the driving voltage and driving frequency. At last a set of test system is established to study the relationship between the traction force and the load of the wheelbarrow. With the increase of the load, the traction force increases too and it can reach 16.4N when the load is 80N.

  • A large travel piezoelectric motor nanopositioning system

    A small-sized and large travel nanopositioning system was presented, the actuation characteristic of a piezoelectric motor with multi-claws was analyzed and tested. Considering the influence on nanopositioning of strike force caused by the piezoelectric motor's claws touching the ceramic rod of rotor or reaction force caused by the piezoelectric motor's claws returning with inertia to original point, a smoothing actuation algorithm with one of varied stepping distance actuation zone and one of actuation mode converting point was studied, by which the big positioning disturbance caused by strike force and reaction force were avoided, therefore the large travel actuation velocity of 0~1mm/s and 1nm positioning resolution with no overshoot were well met.

  • High precision ANN-based adaptive displacement tracking of piezoelectric actuators for MEMS

    In this paper, we introduce an artificial neural network (ANN) based motion control methodology of micro actuators for microelectromechanical systems (MEMS). The control strategy is based on a multilayer perception (MLP) trained online using a Lyapunov-based learning technique. The controller achieves high precision tracking under unknown system dynamics including hysteresis and external disturbance. Unlike other ANN control strategies, no a priori offline training or weights initialization is required. Simulation results highlight the performance of the proposed controller in compensating for hysteresis effect. The controller is suitable for very large scale integration (VLSI) implementation and can be used to improve static and dynamic performances of nanopositioning systems.

  • Measurements with an atomic force microscope using a long travel nanopositioning and nanomeasuring machine

    A nanopositioning and -measuring machine (NMM) was developed at the Institute of Measurement and Sensor Technology. It offers a movement range of 25 mm/spl times/25 mm/spl times/5 mm with a resolution of 0.1 nm. To use the NMM as an instrument to measure micro- and nanostructures on small objects a commercial atomic force microscope (AFM) was integrated. An ULTRAObjective standard by Surface Imaging Systems Germany was used for this. Extensive measurements were carried out to test the metrological characteristics of the system. Different measuring modes showed a big influence on the achieved results.

  • Nano-lithography using micropipette

    We are developing a novel lithography system for nanometric scale pattern fabrication using near-field technology. We have built our own scanning shear force microscope for this purpose, where a micropipette is used as a probe. Using shear force distance regulation, the pipette probe follows the sample surface topography and on the desired point, photoresist is ejected on to the sample surface by applying pressure on the other side of pipette using an inchworm. Various patterns can be fabricated by scanning the sample and by control of photoresist ejection.

  • Analysis on the displacement performances of parallel four-bar flexure hinge mechanism

    The formulas of the displacement performances of single and double parallel four-bar flexure hinge mechanisms are theoretically given at first. Then, the output displacements and coupling errors of parallel four-bar flexure hinge mechanism are quantitatively analyzed by means of the finite element method (FEM). The analytical result demonstrates that for the same output displacement the coupling error of single parallel four-bar mechanism is far larger than that of double parallel four-bar mechanism. In the end, the conclusion can be drawn that double parallel four-bar mechanism should be adapted in nanopositioning field.

  • Displacement Sensing With Silicon Flexures in MEMS Nanopositioners

    We report a novel piezoresistive microelectromechanical system (MEMS) differential displacement sensing technique with a minimal footprint realized through a standard MEMS fabrication process, whereby no additional doping is required to build the piezoresistors. The design is based on configuring a pair of suspension beams attached to a movable stage so that they experience opposite axial forces when the stage moves. The resulting difference between the beam resistances is transduced into a sensor output voltage using a halfbridge readout circuit and differential amplifier. Compared with a single piezoresistive flexure sensor, the design approximately achieves 2, 22, and 200 times improvement in sensitivity, linearity, and resolution, respectively, with 1.5-nm resolution over a large travel range exceeding 12 μm.



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