Conferences related to Microactuators

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2020 42nd Annual International Conference of the IEEE Engineering in Medicine & Biology Society (EMBC)

The conference program will consist of plenary lectures, symposia, workshops and invitedsessions of the latest significant findings and developments in all the major fields of biomedical engineering.Submitted papers will be peer reviewed. Accepted high quality papers will be presented in oral and postersessions, will appear in the Conference Proceedings and will be indexed in PubMed/MEDLINE


2020 IEEE 29th International Symposium on Industrial Electronics (ISIE)

ISIE focuses on advancements in knowledge, new methods, and technologies relevant to industrial electronics, along with their applications and future developments.


2020 IEEE International Conference on Systems, Man, and Cybernetics (SMC)

The 2020 IEEE International Conference on Systems, Man, and Cybernetics (SMC 2020) will be held in Metro Toronto Convention Centre (MTCC), Toronto, Ontario, Canada. SMC 2020 is the flagship conference of the IEEE Systems, Man, and Cybernetics Society. It provides an international forum for researchers and practitioners to report most recent innovations and developments, summarize state-of-the-art, and exchange ideas and advances in all aspects of systems science and engineering, human machine systems, and cybernetics. Advances in these fields have increasing importance in the creation of intelligent environments involving technologies interacting with humans to provide an enriching experience and thereby improve quality of life. Papers related to the conference theme are solicited, including theories, methodologies, and emerging applications. Contributions to theory and practice, including but not limited to the following technical areas, are invited.


2020 IEEE International Conference on Robotics and Automation (ICRA)

The International Conference on Robotics and Automation (ICRA) is the IEEE Robotics and Automation Society’s biggest conference and one of the leading international forums for robotics researchers to present their work.


2020 IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM)

The scope of the 2020 IEEE/ASME AIM includes the following topics: Actuators, Automotive Systems, Bioengineering, Data Storage Systems, Electronic Packaging, Fault Diagnosis, Human-Machine Interfaces, Industry Applications, Information Technology, Intelligent Systems, Machine Vision, Manufacturing, Micro-Electro-Mechanical Systems, Micro/Nano Technology, Modeling and Design, System Identification and Adaptive Control, Motion Control, Vibration and Noise Control, Neural and Fuzzy Control, Opto-Electronic Systems, Optomechatronics, Prototyping, Real-Time and Hardware-in-the-Loop Simulation, Robotics, Sensors, System Integration, Transportation Systems, Smart Materials and Structures, Energy Harvesting and other frontier fields.



Periodicals related to Microactuators

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Advanced Packaging, IEEE Transactions on

The IEEE Transactions on Advanced Packaging has its focus on the modeling, design, and analysis of advanced electronic, photonic, sensors, and MEMS packaging.


Biomedical Engineering, IEEE Transactions on

Broad coverage of concepts and methods of the physical and engineering sciences applied in biology and medicine, ranging from formalized mathematical theory through experimental science and technological development to practical clinical applications.


Circuits and Systems II: Express Briefs, IEEE Transactions on

Part I will now contain regular papers focusing on all matters related to fundamental theory, applications, analog and digital signal processing. Part II will report on the latest significant results across all of these topic areas.


Control Systems Technology, IEEE Transactions on

Serves as a compendium for papers on the technological advances in control engineering and as an archival publication which will bridge the gap between theory and practice. Papers will highlight the latest knowledge, exploratory developments, and practical applications in all aspects of the technology needed to implement control systems from analysis and design through simulation and hardware.


Industrial Electronics, IEEE Transactions on

Theory and applications of industrial electronics and control instrumentation science and engineering, including microprocessor control systems, high-power controls, process control, programmable controllers, numerical and program control systems, flow meters, and identification systems.



Most published Xplore authors for Microactuators

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Xplore Articles related to Microactuators

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Feedback-error-learning neural network for trajectory control of a flexible micro-actuator

Proceedings of IEEE/ASME International Conference on Advanced Intelligent Mechatronics, 1997

Summary form only given. A neural network approach to online learning control and real-time implementation for a flexible microactuator is presented. The flexible microactuator is made of a bimorph piezoelectric high-polymer material (poly vinylidene fluoride). The bimorph piezoelectric microactuator consists of two PVDF films cemented with a metal shim in proper polarity. When a voltage is applied across the elements, ...


Multivariable controller design for hard drive dual-stage actuator servo systems

IEEE International Conference on Mechatronics, 2005. ICM '05., 2005

A multivariable multi-objective approach has been presented for the design of servo controller for a dual-stage actuator system. The designed control algorithm instructs the two actuators to cooperate towards a faster track seeking and better disturbance rejection than any actuator acting alone. Cooperation is explicitly formulated as control objectives and the optimal control algorithm is designed using the H2 control ...


CAD challenges for microsensors, microactuators, and microsystems

Proceedings of the IEEE, 1998

In parallel with the development of new technologies, new device configurations, and new applications for microsensors, microactuators, and microsystems, also referred to as microelectromechanical devices and systems (MEMS), there has arisen a growing need for computer-aided engineering and design systems. There is a wide range of design problems: process simulation, solid-body geometric renderings from photomasks and process descriptions, energetically correct ...


Thermally driven microactuator containing thermal isolation structure with polyimide and its application to microvalve

TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664), 2003

We have developed a thermally /spl middot/ isolated bimorph structure based on a silicon (Si) /nickel (Ni) pair. A 2.5-mm-long beam of the bimorph was thermally isolated by a polyimide comb from the rest of the Si structure. The Si and Ni layers of the bimorph were 30 /spl mu/m and 25 /spl mu/m thick, respectively. This geometry enabled us ...


Electrostatic microactuators with integrated gear linkages for mechanical power transmission

Proceedings of Ninth International Workshop on Micro Electromechanical Systems, 1996

In this paper a surface micromachining process is presented which has been used to fabricate electrostatic microactuators that are interconnected with each other and linked to other movable microstructures by integrated gear linkages. The gear linkages consist of rotational and linear gear structures and the electrostatic microactuators include curved electrode actuators, comb drive actuators and axial gap wobble motors. The ...



Educational Resources on Microactuators

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IEEE.tv Videos

No IEEE.tv Videos are currently tagged "Microactuators"

IEEE-USA E-Books

  • Feedback-error-learning neural network for trajectory control of a flexible micro-actuator

    Summary form only given. A neural network approach to online learning control and real-time implementation for a flexible microactuator is presented. The flexible microactuator is made of a bimorph piezoelectric high-polymer material (poly vinylidene fluoride). The bimorph piezoelectric microactuator consists of two PVDF films cemented with a metal shim in proper polarity. When a voltage is applied across the elements, the upper layer elongates, while the lower contracts producing a deflection. The control scheme consists of a feedforward neural network controller and a fixed-gain PID controller. This neural network controller is trained so as to make the output of the PID controller zero. In the process, the neural network learns the inverse dynamics of the system. The feedback-error-learning controller is implemented using a digital signal processor, and experimental results are given.

  • Multivariable controller design for hard drive dual-stage actuator servo systems

    A multivariable multi-objective approach has been presented for the design of servo controller for a dual-stage actuator system. The designed control algorithm instructs the two actuators to cooperate towards a faster track seeking and better disturbance rejection than any actuator acting alone. Cooperation is explicitly formulated as control objectives and the optimal control algorithm is designed using the H2 control theory and regulator theory. Each actuator's involvement in the cooperation can be further adjusted by changing the design weighting coefficients, while the design procedure guarantees the stability of the control system.

  • CAD challenges for microsensors, microactuators, and microsystems

    In parallel with the development of new technologies, new device configurations, and new applications for microsensors, microactuators, and microsystems, also referred to as microelectromechanical devices and systems (MEMS), there has arisen a growing need for computer-aided engineering and design systems. There is a wide range of design problems: process simulation, solid-body geometric renderings from photomasks and process descriptions, energetically correct simulations of behavior across multiple coupled energy domains, extraction of lumped low-order models of device behavior, optimization of geometry and process sequence, and design of full systems that include MEMS devices. Because of the computational demands of the modeling required to support full computer-aided design (CAD), there is a premium on fast and memory-efficient algorithms that help the designer, both by automating, where possible, complex sets of related tasks and by providing rapid computational prototyping at critical points in the design cycle. This paper presents an overview of the present state of the art in CAD for MEMS, with particular emphasis on the role of macromodels and test structures as part of the design environment.

  • Thermally driven microactuator containing thermal isolation structure with polyimide and its application to microvalve

    We have developed a thermally /spl middot/ isolated bimorph structure based on a silicon (Si) /nickel (Ni) pair. A 2.5-mm-long beam of the bimorph was thermally isolated by a polyimide comb from the rest of the Si structure. The Si and Ni layers of the bimorph were 30 /spl mu/m and 25 /spl mu/m thick, respectively. This geometry enabled us to generate the bending displacement (the stroke) of the free end of the bimorph up to 100 /spl mu/m at about 100 /spl deg/C with a generated force of about 15 mN. A low-voltage actuation (<3V) and low-energy consumption (<0.2W) were achieved. Besides, the miniaturized Si/Ni bimorph actuator was incorporated into the valve structure. The actual size of the fabricated valve is 7.3/spl times/5.8/spl times/1.2 mm/sup 3/. The flow rate from 0 to 500 ml/min at the air pressure of 47 kPa with low leakage rate of 0.03 ml/min and good linearity of the air pressure control were achieved.

  • Electrostatic microactuators with integrated gear linkages for mechanical power transmission

    In this paper a surface micromachining process is presented which has been used to fabricate electrostatic microactuators that are interconnected with each other and linked to other movable microstructures by integrated gear linkages. The gear linkages consist of rotational and linear gear structures and the electrostatic microactuators include curved electrode actuators, comb drive actuators and axial gap wobble motors. The micromechanical structures are constructed from polysilicon. Silicon dioxide has been used as a sacrificial layer and silicon nitride was used for electrical insulation. A cyclohexane freeze drying technique is used to prevent problems with stiction. The actuators, loaded with various mechanisms, have been driven successfully by electrostatic actuation. The work is a first step towards mechanical power transmission in micromechanical systems.

  • Small, soft, and safe microactuator for retinal pigment epithelium transplantation

    This paper proposes a novel surgical tool for the retinal pigment epithelium (RPE) sheet transplantation. The proposed tool employs the principle of pneumatic balloon actuator (PBA). It is possible to design small, soft and safe surgical tool by using PBA because PBA is made of PDMS and driven by pneumatic pressure. These distinctive characteristics of PBA are attractive for such a challenging surgery as the RPE sheet transplantation in an eyeball. The designed head size of tool is 3 mm times 3 mm times 100 mum by taking account of the size of the RPE sheet (3 mm times 3 mm). The developed tool can perform sequential motions through independent control of different PBA so as to introduce and transplant the RPE sheet to an eyeball. Generated force by the movement of the transplantation tool is measured around 3 mN, which is allowable in an eyeball. Experimental results of both in vitro and in vivo test by using the developed tool will be reported to demonstrate feasibility of our strategy.

  • An electrothermal microlens scanner with low-voltage large-vertical-displacement actuation

    This letter reports the design, fabrication, and operation of a microlens scanner that can perform large vertical scans at low actuation voltages. Photoresist (PR) reflow technique was used to form a 210-μm-diameter PR microlens on a lens holder which is integrated with a large-vertical- displacement (LVD) microactuator. The lens holder is fabricated using a maskless deep-reactive-ion-etch complementary-metal-oxide-semiconductor microelectromechanical systems process. A maximum static vertical displacement of 280 μm is achieved with a 700 by 320 μm LVD device at a low actuation voltage of 10 V. The microlens has a focal length of 188 μm, a numerical aperture of 0.35, and a resonant frequency of about 1 kHz.

  • Thin film piezoelectric dual-stage actuator for HDD

    Summary form only given. A new dual-stage actuator for positioning a magnetic head for high-density hard disk drives (HDDs) was proposed and developed. This dual-stage actuator device is characterized by applying the sputter-deposited thin film PZT, instead of the previously proposed bulk type actuator (Y. Soeno et al., IEEE Trans. Magn., vol. 35, pp. 983-987, 1999).

  • Micro-actuated small-scale spherical retroreflector for free space optical communications

    This paper describes the use of electrothermal MEMS actuation and small-scale spherical retroreflectors to produce a retroreflective optical phase modulator

  • Microengineered systems for the hearing impaired

    To overcome some of the technical and cosmetic objections, several research teams, most recently Maniglia et al. (1995), have investigated the direct electromechanical stimulation of either the ossicular chain or of the oval window of the cochlea, by means of a device implanted in the middle ear. For a smaller group of hearing impaired, alternative temporal bone-conduction devices which bypass the outer and middle ear function, or cochlea implants to provide direct electrical stimulation of the auditory nerve, can be considered. An implantable device has only been developed to the feasibility study stage. Much of the work already carried out on the diaphragm of the microspeaker looks promising and a prototype device is ready for testing. Results from this will also go some way towards proving the study on the implantable device. New topologies of magnet and coil are possible and will be investigated for their potential to improve both devices. Clearly, if the SPL figures of the microspeaker are to be maintained, any reduction in the area of the diaphragm must be accompanied by an increase in its deflection. For some applications such a size reduction could prove to be essential and possible improvements to the diaphragm such as corrugating the edges may then be necessary.



Standards related to Microactuators

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No standards are currently tagged "Microactuators"