Conferences related to Electrostatic actuators

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2020 59th IEEE Conference on Decision and Control (CDC)

The CDC is the premier conference dedicated to the advancement of the theory and practice of systems and control. The CDC annually brings together an international community of researchers and practitioners in the field of automatic control to discuss new research results, perspectives on future developments, and innovative applications relevant to decision making, automatic control, and related areas.


2020 American Control Conference (ACC)

The ACC is the annual conference of the American Automatic Control Council (AACC, the U.S. national member organization of the International Federation for Automatic Control (IFAC)). The ACC is internationally recognized as a premier scientific and engineering conference dedicated to the advancement of control theory and practice. The ACC brings together an international community of researchers and practitioners to discuss the latest findings in automatic control. The 2020 ACC technical program will

  • 2019 American Control Conference (ACC)

    Technical topics include biological systems, vehicle dynamics and control, adaptive control, consensus control, cooperative control, control of communication networks, control of networked systems, control of distributed parameter systems, decentralized control, delay systems, discrete-event systems, fault detection, fault-tolerant systems, flexible structures, flight control, formation flying, fuzzy systems, hybrid systems, system identification, iterative learning control, model predictive control, linear parameter-varying systems, linear matrix inequalities, machine learning, manufacturing systems, robotics, multi-agent systems, neural networks, nonlinear control, observers, optimal control, optimization, path planning, navigation, robust control, sensor fusion, sliding mode control, stochastic systems, switched systems, uncertain systems, game theory.

  • 2018 Annual American Control Conference (ACC)

    Technical topics include biological systems, vehicle dynamics and control, adaptive control, consensus control, cooperative control, control of communication networks, control of networked systems, control of distributed parameter systems, decentralized control, delay systems, discrete-event systems, fault detection, fault-tolerant systems, flexible structures, flight control, formation flying, fuzzy systems, hybrid systems, system identification, iterative learning control, model predictive control, linear parameter-varying systems, linear matrix inequalities, machine learning, manufacturing systems, robotics, multi-agent systems, neural networks, nonlinear control, observers, optimal control, optimization, path planning, navigation, robust control, sensor fusion, sliding mode control, stochastic systems, switched systems, uncertain systems, game theory.

  • 2017 American Control Conference (ACC)

    Technical topics include biological systems, vehicle dynamics and control, adaptive control, consensus control, cooperative control, control of communication networks, control of networked systems, control of distributed parameter systems, decentralized control, delay systems, discrete-event systems, fault detection, fault-tolerant systems, flexible structures, flight control, formation flying, fuzzy systems, hybrid systems, system identification, iterative learning control, model predictive control, linear parameter-varying systems, linear matrix inequalities, machine learning, manufacturing systems, robotics, multi-agent systems, neural networks, nonlinear control, observers, optimal control, optimization, path planning, navigation, robust control, sensor fusion, sliding mode control, stochastic systems, switched systems, uncertain systems, game theory.

  • 2016 American Control Conference (ACC)

    Control systems theory and practice. Conference topics include biological systems, vehicle dynamics and control, consensus control, cooperative control, control of communication networks, control of networked systems, control of distributed parameter systems, decentralized control, delay systems, discrete-event systems, fault detection, fault-tolerant systems, flexible structures, flight control, formation flying, fuzzy systems, hybrid systems, system identification, iterative learning control, model predictive control, linear parameter-varying systems, linear matrix inequalities, machine learning, manufacturing systems, robotics, multi-agent systems, neural networks, nonlinear control, observers, optimal control, optimization, path planning, navigation, robust control, sensor fusion, sliding mode control, stochastic systems, switched systems, uncertain systems, game theory.

  • 2015 American Control Conference (ACC)

    control theory, technology, and practice

  • 2014 American Control Conference - ACC 2014

    All areas of the theory and practice of automatic control, including but not limited to network control systems, model predictive control, systems analysis in biology and medicine, hybrid and switched systems, aerospace systems, power and energy systems and control of nano- and micro-systems.

  • 2013 American Control Conference (ACC)

    Control systems theory and practice. Conference themes on sustainability, societal challenges for control, smart healthcare systems. Conference topics include biological systems, vehicle dynamics and control, consensus control, cooperative control, control of communication networks, control of networked systems, control of distributed parameter systems, decentralized control, delay systems, discrete-event systems, fault detection, fault-tolerant systems, flexible structures, flight control, formation flying, fuzzy systems, hybrid systems, system identification, iterative learning control, model predictive control, linear parameter-varying systems, linear matrix inequalities, machine learning, manufacturing systems, robotics, multi-agent systems, neural networks, nonlinear control, observers, optimal control, optimization, path planning, navigation, robust control, sensor fusion, sliding mode control, stochastic systems, switched systems, uncertain systems, game theory.

  • 2012 American Control Conference - ACC 2012

    All areas of control engineering and science.

  • 2011 American Control Conference - ACC 2011

    ACC provides a forum for bringing industry and academia together to discuss the latest developments in the area of Automatic Control Systems, from new control theories, to the advances in sensors and actuator technologies, and to new applications areas for automation.

  • 2010 American Control Conference - ACC 2010

    Theory and practice of automatic control

  • 2009 American Control Conference - ACC 2009

    The 2009 ACC technical program will cover new developments related to theory, application, and education in control science and engineering. In addition to regular technical sessions the program will also feature interactive and tutorial sessions and preconference workshops.

  • 2008 American Control Conference - ACC 2008

  • 2007 American Control Conference - ACC 2007

  • 2006 American Control Conference - ACC 2006 (Silver Anniversary)

  • 2005 American Control Conference - ACC 2005

  • 2004 American Control Conference - ACC 2004

  • 2003 American Control Conference - ACC 2003

  • 2002 American Control Conference - ACC 2002

  • 2001 American Control Conference - ACC 2001

  • 2000 American Control Conference - ACC 2000

  • 1999 American Control Conference - ACC '99

  • 1998 American Control Conference - ACC '98

  • 1997 American Control Conference - ACC '97

  • 1996 13th Triennial World Congress of the International Federation of Automatic Control (IFAC)


2020 IEEE International Conference on Robotics and Automation (ICRA)

The International Conference on Robotics and Automation (ICRA) is the IEEE Robotics and Automation Society’s biggest conference and one of the leading international forums for robotics researchers to present their work.


2020 IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM)

The scope of the 2020 IEEE/ASME AIM includes the following topics: Actuators, Automotive Systems, Bioengineering, Data Storage Systems, Electronic Packaging, Fault Diagnosis, Human-Machine Interfaces, Industry Applications, Information Technology, Intelligent Systems, Machine Vision, Manufacturing, Micro-Electro-Mechanical Systems, Micro/Nano Technology, Modeling and Design, System Identification and Adaptive Control, Motion Control, Vibration and Noise Control, Neural and Fuzzy Control, Opto-Electronic Systems, Optomechatronics, Prototyping, Real-Time and Hardware-in-the-Loop Simulation, Robotics, Sensors, System Integration, Transportation Systems, Smart Materials and Structures, Energy Harvesting and other frontier fields.


2020 IEEE/MTT-S International Microwave Symposium (IMS)

The IEEE International Microwave Symposium (IMS) is the world s foremost conference covering the UHF, RF, wireless, microwave, millimeter-wave, terahertz, and optical frequencies; encompassing everything from basic technologies to components to systems including the latest RFIC, MIC, MEMS and filter technologies, advances in CAD, modeling, EM simulation and more. The IMS includes technical and interactive sessions, exhibits, student competitions, panels, workshops, tutorials, and networking events.

  • 2036 IEEE/MTT-S International Microwave Symposium - IMS 2036

    The IEEE International Microwave Symposium (IMS) is the world s foremost conference covering the UHF, RF, wireless, microwave, millimeter-wave, terahertz, and optical frequencies; encompassing everything from basic technologies to components to systems including the latest RFIC, MIC, MEMS and filter technologies, advances in CAD, modeling, EM simulation and more. The IMS includes technical and interactive sessions, exhibits, student competitions, panels, workshops, tutorials, and networking events.

  • 2031 IEEE/MTT-S International Microwave Symposium - IMS 2031

    The IEEE International Microwave Symposium (IMS) is the world s foremost conference covering the UHF, RF, wireless, microwave, millimeter-wave, terahertz, and optical frequencies; encompassing everything from basic technologies to components to systems including the latest RFIC, MIC, MEMS and filter technologies, advances in CAD, modeling, EM simulation and more. The IMS includes technical and interactive sessions, exhibits, student competitions, panels, workshops, tutorials, and networking events.

  • 2029 IEEE/MTT-S International Microwave Symposium - IMS 2029

    The IEEE International Microwave Symposium (IMS) is the world s foremost conference covering the UHF, RF, wireless, microwave, millimeter-wave, terahertz, and optical frequencies; encompassing everything from basic technologies to components to systems including the latest RFIC, MIC, MEMS and filter technologies, advances in CAD, modeling, EM simulation and more. The IMS includes technical and interactive sessions, exhibits, student competitions, panels, workshops, tutorials, and networking events.

  • 2026 IEEE/MTT-S International Microwave Symposium - IMS 2026

    The IEEE International Microwave Symposium (IMS) is the world s foremost conference covering the UHF, RF, wireless, microwave, millimeter-wave, terahertz, and optical frequencies; encompassing everything from basic technologies to components to systems including the latest RFIC, MIC, MEMS and filter technologies, advances in CAD, modeling, EM simulation and more. The IMS includes technical and interactive sessions, exhibits, student competitions, panels, workshops, tutorials, and networking events.

  • 2025 IEEE/MTT-S International Microwave Symposium - IMS 2025

    The IEEE International Microwave Symposium (IMS) is the world s foremost conferencecovering the UHF, RF, wireless, microwave, millimeter-wave, terahertz, and optical frequencies;encompassing everything from basic technologies to components to systems including thelatest RFIC, MIC, MEMS and filter technologies, advances in CAD, modeling, EM simulationand more. The IMS includes technical and interactive sessions, exhibits, student competitions,panels, workshops, tutorials, and networking events.

  • 2024 IEEE/MTT-S International Microwave Symposium - IMS 2024

    The IEEE International Microwave Symposium (IMS) is the world s foremost conference covering the UHF, RF, wireless, microwave, millimeter-wave, terahertz, and optical frequencies; encompassing everything from basic technologies to components to systems including the latest RFIC, MIC, MEMS and filter technologies, advances in CAD, modeling, EM simulation and more. The IMS includes technical and interactive sessions, exhibits, student competitions, panels, workshops, tutorials, and networking events.

  • 2023 IEEE/MTT-S International Microwave Symposium - IMS 2023

    The IEEE International Microwave Symposium (IMS) is the world s foremost conference covering the UHF, RF, wireless, microwave, millimeter-wave, terahertz, and optical frequencies; encompassing everything from basic technologies to components to systems including the latest RFIC, MIC, MEMS and filter technologies, advances in CAD, modeling, EM simulation and more. The IMS includes technical and interactive sessions, exhibits, student competitions, panels, workshops, tutorials, and networking events.

  • 2022 IEEE/MTT-S International Microwave Symposium - IMS 2022

    The IEEE International Microwave Symposium (IMS) is the world s foremost conference covering the UHF, RF, wireless, microwave, millimeter-wave, terahertz, and optical frequencies; encompassing everything from basic technologies to components to systems including the latest RFIC, MIC, MEMS and filter technologies, advances in CAD, modeling, EM simulation and more. The IMS includes technical and interactive sessions, exhibits, student competitions, panels, workshops, tutorials, and networking events.

  • 2021 IEEE/MTT-S International Microwave Symposium - IMS 2021

    The IEEE MTT-S International Microwave Symposium (IMS) is the premier conference covering basic technologies, to passives and actives components to system over a wide range of frequencies including VHF, UHF, RF, microwave, millimeter-wave, terahertz, and optical. The conference will encompass the latest in RFIC, MIC, MEMS and filter technologies, advances in CAD, modeling, EM simulation, wireless systems, RFID and related topics.

  • 2019 IEEE/MTT-S International Microwave Symposium - IMS 2019

    Comprehensive symposium on microwave theory and techniques including active and passive circuit components, theory and microwave systems.

  • 2018 IEEE/MTT-S International Microwave Symposium - IMS 2018

    Microwave theory and techniques, RF/microwave/millimeter-wave/terahertz circuit design and fabrication technology, radio/wireless communication.

  • 2017 IEEE/MTT-S International Microwave Symposium - IMS 2017

    The IEEE MTT-S International Microwave Symposium (IMS) is the premier conference covering basic technologies, to passives and actives components to system over a wide range of frequencies including VHF, UHF, RF, microwave, millimeter-wave, terahertz, and optical. The conference will encompass the latest in RFIC, MIC, MEMS and filter technologies, advances in CAD, modeling, EM simulation, wireless systems, RFID and related topics.

  • 2016 IEEE/MTT-S International Microwave Symposium - IMS 2016

    The IEEE International Microwave Symposium (IMS) is the world s foremost conference covering the UHF, RF, wireless, microwave, millimeter-wave, terahertz, and optical frequencies; encompassing everything from basic technologies to components to systems including the latest RFIC, MIC, MEMS and filter technologies, advances in CAD, modeling, EM simulation and more. The IMS includes technical and interactive sessions, exhibits, student competitions, panels, workshops, tutorials, and networking events.

  • 2015 IEEE/MTT-S International Microwave Symposium - MTT 2015

    The IEEE MTT-S International Microwave Symposium (IMS) is the premier conference covering basic technologies, to passives and actives components to system over a wide range of frequencies including VHF, UHF, RF, microwave, millimeter-wave, terahertz, and optical. The conference will encompass the latest in RFIC, MIC, MEMS and filter technologies, advances in CAD, modeling, EM simulation, wireless systems, RFID and related topics. The IMS includes technical sessions, both oral and interactive, worksh

  • 2014 IEEE/MTT-S International Microwave Symposium - MTT 2014

    IMS2014 will cover developments in microwave technology from nano devices to system applications. Technical paper sessions, interactive forums, plenary and panel sessions, workshops, short courses, industrial exhibits, and a wide array of other technical activities will be offered.

  • 2013 IEEE/MTT-S International Microwave Symposium - MTT 2013

    The IEEE MTT-S International Microwave Symposium (IMS) is the premier conference covering basic technologies, to passives and actives components to system over a wide range of frequencies including VHF, UHF, RF, microwave, millimeter -wave, terahertz, and optical. The conference will encompass the latest in RFIC, MIC, MEMS and filter technologies, advances in CAD, modeling, EM simulation, wireless systems, RFID and related topics.The IMS includes technical and interactive sessions, exhibits, student competitions, panels, workshops, tutorials, and networking events.

  • 2012 IEEE/MTT-S International Microwave Symposium - MTT 2012

    The IEEE International Microwave Symposium (IMS) is the world s foremost conference covering the UHF, RF, wireless, microwave, millimeter-wave, terahertz, and optical frequencies; encompassing everything from basic technologies to components to systems including the latest RFIC, MIC, MEMS and filter technologies, advances in CAD, modeling, EM simulation and more. The IMS includes technical and interactive sessions, exhibits, student competitions, panels, workshops, tutorials, and networking events.

  • 2011 IEEE/MTT-S International Microwave Symposium - MTT 2011

    The IEEE International Microwave Symposium (IMS) is the world s foremost conference covering the UHF, RF, wireless, microwave, millimeter-wave, terahertz, and optical frequencies; encompassing everything from basic technologies to components to systems including the latest RFIC, MIC, MEMS and filter technologies, advances in CAD, modeling, EM simulation and more. The IMS includes technical and interactive sessions, exhibits, student competitions, panels, workshops, tutorials, and networking events.

  • 2010 IEEE/MTT-S International Microwave Symposium - MTT 2010

    Reports of research and development at the state-of-the-art of the theory and techniques related to the technology and applications of devices, components, circuits, modules and systems in the RF, microwave, millimeter-wave, submillimeter-wave and Terahertz ranges of the electromagnetic spectrum.

  • 2009 IEEE/MTT-S International Microwave Symposium - MTT 2009

    The IEEE International Microwave Symposium (IMS) is the world s foremost conference covering the UHF, RF, wireless, microwave, millimeter-wave, terahertz, and optical frequencies; encompassing everything from basic technologies to components to systems including the latest RFIC, MIC, MEMS and filter technologies, advances in CAD, modeling, EM simulation and more. The IMS includes technical and interactive sessions, exhibits, student competitions, panels, workshops, tutorials, and networking events.

  • 2008 IEEE/MTT-S International Microwave Symposium - MTT 2008

  • 2007 IEEE/MTT-S International Microwave Symposium - MTT 2007

  • 2006 IEEE/MTT-S International Microwave Symposium - MTT 2006

  • 2005 IEEE/MTT-S International Microwave Symposium - MTT 2005

  • 2004 IEEE/MTT-S International Microwave Symposium - MTT 2004

  • 2003 IEEE/MTT-S International Microwave Symposium - MTT 2003

  • 2002 IEEE/MTT-S International Microwave Symposium - MTT 2002

  • 2001 IEEE/MTT-S International Microwave Symposium - MTT 2001

  • 2000 IEEE/MTT-S International Microwave Symposium - MTT 2000

  • 1999 IEEE/MTT-S International Microwave Symposium - MTT '99

  • 1998 IEEE/MTT-S International Microwave Symposium - MTT '98

  • 1997 IEEE/MTT-S International Microwave Symposium - MTT '97

  • 1996 IEEE/MTT-S International Microwave Symposium - MTT '96


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Periodicals related to Electrostatic actuators

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Applied Superconductivity, IEEE Transactions on

Contains articles on the applications and other relevant technology. Electronic applications include analog and digital circuits employing thin films and active devices such as Josephson junctions. Power applications include magnet design as well asmotors, generators, and power transmission


Automatic Control, IEEE Transactions on

The theory, design and application of Control Systems. It shall encompass components, and the integration of these components, as are necessary for the construction of such systems. The word `systems' as used herein shall be interpreted to include physical, biological, organizational and other entities and combinations thereof, which can be represented through a mathematical symbolism. The Field of Interest: shall ...


Biomedical Engineering, IEEE Transactions on

Broad coverage of concepts and methods of the physical and engineering sciences applied in biology and medicine, ranging from formalized mathematical theory through experimental science and technological development to practical clinical applications.


Computer

Computer, the flagship publication of the IEEE Computer Society, publishes peer-reviewed technical content that covers all aspects of computer science, computer engineering, technology, and applications. Computer is a resource that practitioners, researchers, and managers can rely on to provide timely information about current research developments, trends, best practices, and changes in the profession.


Control Systems Technology, IEEE Transactions on

Serves as a compendium for papers on the technological advances in control engineering and as an archival publication which will bridge the gap between theory and practice. Papers will highlight the latest knowledge, exploratory developments, and practical applications in all aspects of the technology needed to implement control systems from analysis and design through simulation and hardware.


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Most published Xplore authors for Electrostatic actuators

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Xplore Articles related to Electrostatic actuators

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A fully functional micro transportation system with strider-like movement of micro containers

2008 IEEE 21st International Conference on Micro Electro Mechanical Systems, 2008

This paper presents a novel micro transportation system (MTS), which can drive micro containers in both straight and curved paths, based on electrostatic and ratchet mechanism. The micro container, which has driving-wings and anti- reverse-wings attached to the central 'backbone', is driven by electrostatic actuator through the ratchet racks in perpendicular direction. The container with the length and width of ...


A high force low area MEMS thermal actuator

ITHERM 2000. The Seventh Intersociety Conference on Thermal and Thermomechanical Phenomena in Electronic Systems (Cat. No.00CH37069), 2000

This paper presents a new type of MEMS (micro-electromechanical systems) actuator consisting of an array of in-plane micro-fabricated thermal buckle- beam actuators. The technology used in MEMS actuators is typically magnetic, electrostatic or thermal. Magnetic actuators may require special materials in the fabrication process while electrostatic actuators typically require high voltages, large chip areas and produce very low forces. Thermal ...


Novel Atomic Force Microscope Probes with Integrated Electrostatic Actuation and Optical Detection

LEOS 2007 - IEEE Lasers and Electro-Optics Society Annual Meeting Conference Proceedings, 2007

In this work, a new class of atomic force microscope (AFM) probe, called force-sensing integrated readout and active tip (FIRAT), is developed. It combines several micromechanical devices (MEMS) techniques, diffraction based optical sensing and electrostatic actuation, to improve the speed and sensitivity of AFM systems for imaging and force measurement applications both in air and in liquid media.


GaSb-based Micro-Mechanical External-Cavity Laser Emitting around 2.3μm

IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006., 2006

We report on GaSb-based quantum-well diode lasers in a micro-machined external cavity setup using the Littrow-configuration. An electrostatically actuated Si-grating, optimized to achieve a wide tuning range in the 2.3mum wavelength range, is used as a tuning element


Novelmicro Transportation Systems Based on Ratchetmechanism and Electrostatic Actuators

TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference, 2007

This paper describes a design and fabrication of Si micro transportation systems (MTS) to drive microcars based on ratchet mechanism and electrostatic comb-drive actuators. This MTS consists of linear and rotational comb actuators, microcars, and micro ratchet mechanism. The microcars can be moved with different velocities by comb-drive actuators through ratchet teeth. In this study, the MTS was fabricated by ...


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Educational Resources on Electrostatic actuators

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IEEE-USA E-Books

  • A fully functional micro transportation system with strider-like movement of micro containers

    This paper presents a novel micro transportation system (MTS), which can drive micro containers in both straight and curved paths, based on electrostatic and ratchet mechanism. The micro container, which has driving-wings and anti- reverse-wings attached to the central 'backbone', is driven by electrostatic actuator through the ratchet racks in perpendicular direction. The container with the length and width of 450 mum and 250 mum, respectively, moves like a water strider with desirable velocity up to 200 mum/sec in the straight and curved paths. In order to create the smart and flexible MTS, the elemental modules, e.g. straight, turning and separation modules with the same size (6 mm x 6 mm) have been developed. Therefore, different configurations of the MTS can be created flexibly by assembling the elemental modules.

  • A high force low area MEMS thermal actuator

    This paper presents a new type of MEMS (micro-electromechanical systems) actuator consisting of an array of in-plane micro-fabricated thermal buckle- beam actuators. The technology used in MEMS actuators is typically magnetic, electrostatic or thermal. Magnetic actuators may require special materials in the fabrication process while electrostatic actuators typically require high voltages, large chip areas and produce very low forces. Thermal actuators have seen some use in MEMS applications, the most popular being the pseudo-bimorph that relies on differential expansion of a cold and hot arm to cause it to bend in-plane (parallel to the substrate). These thermal actuators typically generate on the order of a few micro-Newtons each but can be combined for larger forces by linking with small tendons. A disadvantage of this type of actuator is that it moves in an are where most desired movements are linear. Also, when combined in an array, the linking tendons consume much of the energy in bending them. Also, arrays of these can still occupy a fairly large chip area. The electro-thermal actuator described here resembles a chevron where an array of buckle-beams are packed close together and link two common anchored arms with a movable third arm. Arrays can be made within a single released micromachined layer and generate many mN of force. Additional actuators can be arrayed with no coupling penalty and occupy much less area that an equivalent pseudo-bimorph actuator. Preliminary tests indicate that a 450/spl times/120 /spl mu/m array consumes 240 mW of power, deflection up to 14 /spl mu/m and can produce many milli-Newtons. A chip of actuator geometry variations and different applications has been fabricated and tested.

  • Novel Atomic Force Microscope Probes with Integrated Electrostatic Actuation and Optical Detection

    In this work, a new class of atomic force microscope (AFM) probe, called force-sensing integrated readout and active tip (FIRAT), is developed. It combines several micromechanical devices (MEMS) techniques, diffraction based optical sensing and electrostatic actuation, to improve the speed and sensitivity of AFM systems for imaging and force measurement applications both in air and in liquid media.

  • GaSb-based Micro-Mechanical External-Cavity Laser Emitting around 2.3μm

    We report on GaSb-based quantum-well diode lasers in a micro-machined external cavity setup using the Littrow-configuration. An electrostatically actuated Si-grating, optimized to achieve a wide tuning range in the 2.3mum wavelength range, is used as a tuning element

  • Novelmicro Transportation Systems Based on Ratchetmechanism and Electrostatic Actuators

    This paper describes a design and fabrication of Si micro transportation systems (MTS) to drive microcars based on ratchet mechanism and electrostatic comb-drive actuators. This MTS consists of linear and rotational comb actuators, microcars, and micro ratchet mechanism. The microcars can be moved with different velocities by comb-drive actuators through ratchet teeth. In this study, the MTS was fabricated by using SOI wafer with device layer of 30μm, buried SiO2layer of 4μm, and with only one mask. In our experiments, the movement of the microcar has been tested with driving frequency ranges from 5Hz to 40Hz. The velocity of the microcar was proportional to the driving frequency, and it matched well with theoretical calculation.

  • Direct Liquid Manipulation by Parallel Micro Syringe System for High Controllability with Pico-Liter Scale

    On-chip picolitter scale micro syringe system by using electrostatically controlled linear actuator (ECLIA) was proposed and demonstrated previously. Parallel sliders of ECLIA can push and pull liquid in channels independently. The system achieved picoliter-scale liquid manipulation, however, the indirect drive through separating membrane caused a poor response. This paper reports an improved system from the aspect of controllability. The improved system directly manipulates liquid by sliders of ECLIA. The head of a slider is 340 μm x 200 μm at the end. 4 sliders are arranged to demonstrate parallel manipulation. A developed system shows 1.37pl/step in fluidic delivery. Furthermore, integrated structure with sliders and channels will be also designed to demonstrate advantages of batch- fabrication.

  • Object Positioning Using A Surface Micromachined Distributed System

    None

  • Electrostatic microactuators with integrated gear linkages for mechanical power transmission

    In this paper a surface micromachining process is presented which has been used to fabricate electrostatic microactuators that are interconnected with each other and linked to other movable microstructures by integrated gear linkages. The gear linkages consist of rotational and linear gear structures and the electrostatic microactuators include curved electrode actuators, comb drive actuators and axial gap wobble motors. The micromechanical structures are constructed from polysilicon. Silicon dioxide has been used as a sacrificial layer and silicon nitride was used for electrical insulation. A cyclohexane freeze drying technique is used to prevent problems with stiction. The actuators, loaded with various mechanisms, have been driven successfully by electrostatic actuation. The work is a first step towards mechanical power transmission in micromechanical systems.

  • Hybrid electrostatic actuator for micromirror tilting

    A novel hybrid electrostatic actuator made up of a planar plate drive and a vertical comb drive is developed for actuating torsional micromirror. The device consisting of the actuator and an into-plane tiltable mirror is fabricated in SOI substrate based on bulk-and-surface mixed silicon micromachining. As demonstrated by experiment, the novel actuator can drive the mirror to achieve large-range continuous tilting as well as spontaneous 90deg tilting induced by the pull-in effect in a voltage control fashion. The continuous tilting range of the micromirror is increased to about 46deg. Both theoretical modeling and experimental observations indicate that, accompanying the increase in the continuous tilting range, the yielding voltage increases. The device has also been used as a mirror switch in an optical system, and the optical insertion loss is measured to be -1.98 dB

  • Improved performance of large stroke comb-drive actuators by using a stepped finger shape

    In this work we describe an electrostatic mass-balanced planar x/y-scanner, using an optimized comb finger shape, designed for parallel-probe storage applications. We show a new stepped comb finger shape design, that has superior force/displacement characteristics leading to a larger stroke at the same voltage and a larger available force compared to straight or tapered shapes.



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