Conferences related to Micromachines

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2020 IEEE International Symposium on Antennas and Propagation and North American Radio Science Meeting

The joint meeting is intended to provide an international forum for the exchange of information on state of the art research in the area of antennas and propagation, electromagnetic engineering and radio science


2020 IEEE 70th Electronic Components and Technology Conference (ECTC)

ECTC is the premier international conference sponsored by the IEEE Components, Packaging and Manufacturing Society. ECTC paper comprise a wide spectrum of topics, including 3D packaging, electronic components, materials, assembly, interconnections, device and system packaging, optoelectronics, reliability, and simulation.


2020 IEEE International Conference on Robotics and Automation (ICRA)

The International Conference on Robotics and Automation (ICRA) is the IEEE Robotics and Automation Society’s biggest conference and one of the leading international forums for robotics researchers to present their work.


2020 IEEE International Magnetic Conference (INTERMAG)

INTERMAG is the premier conference on all aspects of applied magnetism and provides a range of oral and poster presentations, invited talks and symposia, a tutorial session, and exhibits reviewing the latest developments in magnetism.


2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)

The world's premiere conference in MEMS sensors, actuators and integrated micro and nano systems welcomes you to attend this four-day event showcasing major technological, scientific and commercial breakthroughs in mechanical, optical, chemical and biological devices and systems using micro and nanotechnology.The major areas of activity in the development of Transducers solicited and expected at this conference include but are not limited to: Bio, Medical, Chemical, and Micro Total Analysis Systems Fabrication and Packaging Mechanical and Physical Sensors Materials and Characterization Design, Simulation and Theory Actuators Optical MEMS RF MEMS Nanotechnology Energy and Power


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Periodicals related to Micromachines

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Advanced Packaging, IEEE Transactions on

The IEEE Transactions on Advanced Packaging has its focus on the modeling, design, and analysis of advanced electronic, photonic, sensors, and MEMS packaging.


Device and Materials Reliability, IEEE Transactions on

Provides leading edge information that is critical to the creation of reliable electronic devices and materials, and a focus for interdisciplinary communication in the state of the art of reliability of electronic devices, and the materials used in their manufacture. It focuses on the reliability of electronic, optical, and magnetic devices, and microsystems; the materials and processes used in the ...


Electron Devices, IEEE Transactions on

Publishes original and significant contributions relating to the theory, design, performance and reliability of electron devices, including optoelectronics devices, nanoscale devices, solid-state devices, integrated electronic devices, energy sources, power devices, displays, sensors, electro-mechanical devices, quantum devices and electron tubes.


Industrial Electronics, IEEE Transactions on

Theory and applications of industrial electronics and control instrumentation science and engineering, including microprocessor control systems, high-power controls, process control, programmable controllers, numerical and program control systems, flow meters, and identification systems.


Lightwave Technology, Journal of

All aspects of optical guided-wave science, technology, and engineering in the areas of fiber and cable technologies; active and passive guided-wave componentry (light sources, detectors, repeaters, switches, fiber sensors, etc.); integrated optics and optoelectronics; systems and subsystems; new applications; and unique field trials.


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Most published Xplore authors for Micromachines

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Xplore Articles related to Micromachines

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Biomedical applications of micromachines: Small, soft, and safe micromachines based on pneumatic balloon actuator

2016 IEEE CPMT Symposium Japan (ICSJ), 2016

This paper describes biomedical applications of micromachines and introduces a couple of examples from our own studies. Pneumatic balloon actuator has been designed as small, soft, safe micromachines. Pneumatic balloon actuator is micro machined by polymer structures and driven by pneumatic pressure. These features are attractive for biomedical applications. This paper demonstrates examples from medical to bio applications by using ...


Polymeric micromachines driven by laser-induced negative dielectrophoresis

2011 International Symposium on Micro-NanoMechatronics and Human Science, 2011

Optoelectronic micromachines driven by laser-induced dielectrophoretic force were developed by two-photon microfabrication. The optoelectronic driving system consists of the lower photoconductive layer of amorphous silicon on an indium tin oxide (ITO)-coated glass substrate and the upper transparent, conductive ITO-coated glass substrate. Micromachines are fabricated on the upper ITO-coated substrate by two-photon microfabrication. To estimate the driving condition, we examined the ...


Lightwave micromachines

24th European Conference on Optical Communication. ECOC '98 (IEEE Cat. No.98TH8398), 1998

Optical micromachines may soon replace bulk opto-mechanical switches and attenuators in lightwave equipment. These new lightwave micromachines are small and fast, often enabling new functions not available from conventional devices. Applications are identified for long-distance metropolitan, access PON, and undersea links. Experiments with one lightwave micromachine, a MEMS reflective optical switch, illustrate the potential for compact optical attenuators, reconfigurable add/drop ...


A through-silicon-via (TSV) shunt-grounded conductor backed ring resonator

2009 International Conference on Communications, Circuits and Systems, 2009

Miniaturization of communication devices has initiated towards the integration of passive and active radio frequency devices on the single chip in order to reduce the size and cost of the systems. Recent advancement in three- dimensional fabrication technologies in conventional CMOS process is leading to a system-on-chip integration in which RF devices are among the candidates to be integrated. Microwave ...


Remote light-driven micromachines fabricated by 200 nm microstereolithography

Proceedings of the 2001 1st IEEE Conference on Nanotechnology. IEEE-NANO 2001 (Cat. No.01EX516), 2001

We have developed a high-speed two-photon microstereolithography system. The resolution of our system is improved from 200 nm to 140 nm by the optimization of exposure conditions. Freely movable microstructures such as micromanipulators and microgears were also made by use of this system. In our method, movable microstructures are fabricated by fast scanning of an ultrashort-pulsed near-infrared laser beam through ...


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  • Biomedical applications of micromachines: Small, soft, and safe micromachines based on pneumatic balloon actuator

    This paper describes biomedical applications of micromachines and introduces a couple of examples from our own studies. Pneumatic balloon actuator has been designed as small, soft, safe micromachines. Pneumatic balloon actuator is micro machined by polymer structures and driven by pneumatic pressure. These features are attractive for biomedical applications. This paper demonstrates examples from medical to bio applications by using the pneumatic balloon actuator. The micro actuator has been designed according to requirements for individual applications.

  • Polymeric micromachines driven by laser-induced negative dielectrophoresis

    Optoelectronic micromachines driven by laser-induced dielectrophoretic force were developed by two-photon microfabrication. The optoelectronic driving system consists of the lower photoconductive layer of amorphous silicon on an indium tin oxide (ITO)-coated glass substrate and the upper transparent, conductive ITO-coated glass substrate. Micromachines are fabricated on the upper ITO-coated substrate by two-photon microfabrication. To estimate the driving condition, we examined the displacement of a microparticle by focusing a laser beam. Micromachines such as manipulators and microgears were also driven at proper driving condition. Furthermore a prototype of microfluidic components was developed. The optoelectronic micromachines will be powerful tools applicable to high-performance, low-cost lab-on-a-chip devices.

  • Lightwave micromachines

    Optical micromachines may soon replace bulk opto-mechanical switches and attenuators in lightwave equipment. These new lightwave micromachines are small and fast, often enabling new functions not available from conventional devices. Applications are identified for long-distance metropolitan, access PON, and undersea links. Experiments with one lightwave micromachine, a MEMS reflective optical switch, illustrate the potential for compact optical attenuators, reconfigurable add/drop multiplexers, and optically-powered optical circuits.

  • A through-silicon-via (TSV) shunt-grounded conductor backed ring resonator

    Miniaturization of communication devices has initiated towards the integration of passive and active radio frequency devices on the single chip in order to reduce the size and cost of the systems. Recent advancement in three- dimensional fabrication technologies in conventional CMOS process is leading to a system-on-chip integration in which RF devices are among the candidates to be integrated. Microwave resonators are indispensable parts of the modern communication devices. In this paper, we present a ring resonator with shunt grounded ring using through-silicon-via (TSV) technology. Full wave electromagnetic wave simulation results indicate the shift in the resonant frequency of the shunt grounded ring resonator structure. The self inductance of the through-silicon vias contributes to the impedance of the ring structure thereby changing the resonant frequency of the resonator. The resonant frequency of the device with no through-silicon via is designed to be 10 GHz. The shift in resonance frequency by 0.1 GHz is observed in full wave electromagnetic simulation. By introducing the through-silicon vias into the ring resonator structure, the resonant frequency of the structure can be modified. The inductance of individual through-silicon via copper pillars is calculated with electromagnetic simulation. The present result may open a new RF passive device architecture where planar devices are dominating previously.

  • Remote light-driven micromachines fabricated by 200 nm microstereolithography

    We have developed a high-speed two-photon microstereolithography system. The resolution of our system is improved from 200 nm to 140 nm by the optimization of exposure conditions. Freely movable microstructures such as micromanipulators and microgears were also made by use of this system. In our method, movable microstructures are fabricated by fast scanning of an ultrashort-pulsed near-infrared laser beam through the inside of a liquid photocurable polymer. Since the method does not require sacrificial etching processes normally used in major micromachining such as surface micromachining and LIGA process, the fabrication process of movable microstructures can be drastically simplified. In addition, the movable microstructures can be driven by means of laser-scanning micro manipulation, because the resultant microstructures are transparent to visible and near infrared light. In our experiments, micromechanisms such as a microgear and micromanipulators were successfully driven by a focused laser beam. Apart from our method, there are no methods to produce and drive real 3D movable micromachines by light. Such light-driven micro-mechanisms should be developed into various microdevices applicable to microfluidics, chemistry and biochemistry.

  • Micromachines: principles of operation, dynamics, and control

    The paper addresses a comprehensive set of issues related to micromachines in an attempt to qualitatively present forth a complete overview of the field of micro electric machinery. Fundamental concepts of electrostatics and electromagnetics that form the basis and dictate the operation of micromachines are first outlined. Scaling arguments for magnetic micromachines are presented. Principles of operation of both electrostatic and electromagnetic micromachines are explained and a useful form of classification for electrostatic machines is made. The role of microfabrication and its impact on the operation of the micromachine is presented. Finally, the dynamics of micromachines and their control principles are presented. The transient analysis of the micromotor based on its geometrical construction and normal surface forces is also illustrated

  • Optical-layer networking with lightwave micromachines: what do service-providers need and when do they need it?

    The need for optical-layer networking is fuelling an era of invention in functional optical network elements that has probably not been seen since the inaugural years of optical-fiber communications. Most prominently and urgently they need optical-layer crossconnects. It is reasonably clear that lightwave micromachines in fact do not represent the preferred way of implementing the full catalogue of functions articulated. What is astonishing, however, is how many of these functions have a proven history of resisting conventional attack from the more-or-less-standard optoelectronic device arsenal and, correspondingly, how many of them offer serious opportunity for the emerging weaponry of lightwave micromachines. We survey these opportunities, focusing tightly on particularly challenging yet ripening opportunities in optical- layer crossconnects, and describe both the nature and time-scale of the emerging network need, and the dim, foggy outlines of the looming arsenal that is just beginning to take shape to address it.

  • Optically driven micromachines

    All optically driven micromachines can use angular momentum of light to achieve their functions. These micromachines are produced by two photon photopolimerisation process or by producing new materials with a significant birefringence. Applications of these machines will be discussed.

  • Review of Fabrication and Characterization of Nd–Fe–B Thick Films for Magnetic Micromachines

    Isotropic Nd-Fe-B thick film magnets were prepared by a high-speed pulsed laser deposition method followed by a post annealing. The deposition rate of 90 mum/h could be successfully achieved, and a pulse annealing was adopted as the post annealing process in order to enhance coercivity. Use of a substrate heating system under the high deposition rate enabled us to obtain anisotropic thick films with (BH) <sub>max</sub> of approximately 120 kJ/m<sup>3</sup>, which show the potential for an improvement in the properties of the micromachines. Novel micromachines comprising the isotropic films were introduced

  • Elastic properties measurement of glass layers fabricated on silicon wafers for microelectronics and micromachines

    Elastic properties such as the Young's modulus, the Poisson's ratio and the density of Si-B-O glass layers fabricated on [100] silicon substrates by the flame hydrolysis deposition method were measured. Thicknesses of the layers were about 20 /spl mu/m. It was found that the Young's modulus decreased with the boron dopant concentration. The Poisson's ratio was about 0.26 regardless of the boron dopant concentration. The measured elastic properties will be used in the design of micromachines fabricated with silicon substrates and glass layers.<<ETX>>



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