IEEE Organizations related to Microfabrication

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Conferences related to Microfabrication

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2020 19th IEEE Intersociety Conference on Thermal and Thermomechanical Phenomena in Electronic Systems (ITherm)

The ITherm Conference series is the leading international venue for scientific and engineering exploration of thermal, thermomechanical, and emerging technology issues associated with electronic devices, packages, and systems.


2020 42nd Annual International Conference of the IEEE Engineering in Medicine & Biology Society (EMBC)

The conference program will consist of plenary lectures, symposia, workshops and invitedsessions of the latest significant findings and developments in all the major fields of biomedical engineering.Submitted papers will be peer reviewed. Accepted high quality papers will be presented in oral and postersessions, will appear in the Conference Proceedings and will be indexed in PubMed/MEDLINE


2020 IEEE 21st International Conference on Vacuum Electronics (IVEC)

Technical presentations will range from the fundamental physics of electron emission and modulated electron beams to the design and operation of devices at UHF to THz frequencies, theory and computational tool development, active and passive components, systems, and supporting technologies.System developers will find that IVEC provides a unique snapshot of the current state-of-the-art in vacuum electron devices. These devices continue to provide unmatched power and performance for advanced electromagnetic systems, particularly in the challenging frequency regimes of millimeter-wave and THz electronics.Plenary talks will provide insights into the history, the broad spectrum of fundamental physics, the scientific issues, and the technological applications driving the current directions in vacuum electronics research.


2020 IEEE Frontiers in Education Conference (FIE)

The Frontiers in Education (FIE) Conference is a major international conference focusing on educational innovations and research in engineering and computing education. FIE 2019 continues a long tradition of disseminating results in engineering and computing education. It is an ideal forum for sharing ideas, learning about developments and interacting with colleagues inthese fields.


2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)

The world's premiere conference in MEMS sensors, actuators and integrated micro and nano systems welcomes you to attend this four-day event showcasing major technological, scientific and commercial breakthroughs in mechanical, optical, chemical and biological devices and systems using micro and nanotechnology.The major areas of activity in the development of Transducers solicited and expected at this conference include but are not limited to: Bio, Medical, Chemical, and Micro Total Analysis Systems Fabrication and Packaging Mechanical and Physical Sensors Materials and Characterization Design, Simulation and Theory Actuators Optical MEMS RF MEMS Nanotechnology Energy and Power


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Periodicals related to Microfabrication

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Most published Xplore authors for Microfabrication

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Xplore Articles related to Microfabrication

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Design study of an energy-recirculating G-band self-driving folded waveguide traveling-wave tube

2016 IEEE International Vacuum Electronics Conference (IVEC), 2016

We present a design study on a self-driving folded waveguide traveling-wave tube (FWTWT). This device is an energy-recirculating hybrid vacuum tube which has a G-band FWTWT and a folded waveguide (FWG) structure backward-wave oscillator (BWO) as a self-driving source for the FWTWT. The microfabrication of the proposed circuit has been tried using a computer numerical control (CNC) machine and a ...


UV-LIGA microfabrication of 0.3 THz double corrugated waveguide

2017 Eighteenth International Vacuum Electronics Conference (IVEC), 2017

A microfabrication process has been developed by using ultraviolet photolithography (UV-LIGA) with multi-layer SU-8 photoresist to create high aspect ratio Slow Wave Structures (SWS) for millimeter waves and THz vacuum electron devices. The main steps of the process will be described, applied to the fabrication of a double corrugated waveguide at 300 GHz..


A 48-well transparent microelectrode array fabricated utilizing a flexible, “wrapped around” interconnect technology

2016 IEEE SENSORS, 2016

This paper describes the microfabrication, assembly and preliminary characterization of a flexible multi-layer circuit wrapped around a base plate utilized as a high-throughput 48-well Microelectrode Array (MEA) device. Roll to roll flexible circuit technology allows for fine lines and spaces (<;25 μm) to be fabricated in a large area fashion and has been exploited for the first time to our ...


UV-LIGA microfabrication for high frequency structures of a 220GHz TWT amplifier

2016 IEEE International Vacuum Electronics Conference (IVEC), 2016

In this paper, we fabricate copper high frequency structures for a 220GHz TWT amplifier using UV LIGA technology. The two halves have been assembled and bonded. The measurement results of the folded waveguide circuit show that the attenuation factor of the circuit is 240 dB/m.


Microfabricated 94 GHz TWT

IEEE International Vacuum Electronics Conference, 2014

Teraphysics Corporation is developing a 94 GHz, 25 W helical traveling wave tube (TWT) with 60% overall efficiency. The TWT includes several innovations including a reinvented helix geometry and fabrication that is compatible with lithographic, microfabrication techniques; a novel mechanical design where the electron gun, circuit and collector are fabricated simultaneously for alignment within two microns; and a novel, compact, ...


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Educational Resources on Microfabrication

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IEEE-USA E-Books

  • Design study of an energy-recirculating G-band self-driving folded waveguide traveling-wave tube

    We present a design study on a self-driving folded waveguide traveling-wave tube (FWTWT). This device is an energy-recirculating hybrid vacuum tube which has a G-band FWTWT and a folded waveguide (FWG) structure backward-wave oscillator (BWO) as a self-driving source for the FWTWT. The microfabrication of the proposed circuit has been tried using a computer numerical control (CNC) machine and a super-drill. The detailed circuit simulations based on the analytic equations were compared with the CST Studios™ results, and demonstrated considerably good agreement to each other.

  • UV-LIGA microfabrication of 0.3 THz double corrugated waveguide

    A microfabrication process has been developed by using ultraviolet photolithography (UV-LIGA) with multi-layer SU-8 photoresist to create high aspect ratio Slow Wave Structures (SWS) for millimeter waves and THz vacuum electron devices. The main steps of the process will be described, applied to the fabrication of a double corrugated waveguide at 300 GHz..

  • A 48-well transparent microelectrode array fabricated utilizing a flexible, “wrapped around” interconnect technology

    This paper describes the microfabrication, assembly and preliminary characterization of a flexible multi-layer circuit wrapped around a base plate utilized as a high-throughput 48-well Microelectrode Array (MEA) device. Roll to roll flexible circuit technology allows for fine lines and spaces (<;25 μm) to be fabricated in a large area fashion and has been exploited for the first time to our knowledge toward a high-throughput MEA application. Utilizing this technology to develop a microelectrode array has the opportunity to provide cost-effective, disposable consumable devices to the high-throughput biotechnology and biosensor screening markets. The flexibility allows for the circuit to be wrapped around a rigid substrate, thereby allowing backside interconnectivity and eliminating the need for expensive conductive through vias and lowering the number of processing steps. This device has been further assembled and characterized.

  • UV-LIGA microfabrication for high frequency structures of a 220GHz TWT amplifier

    In this paper, we fabricate copper high frequency structures for a 220GHz TWT amplifier using UV LIGA technology. The two halves have been assembled and bonded. The measurement results of the folded waveguide circuit show that the attenuation factor of the circuit is 240 dB/m.

  • Microfabricated 94 GHz TWT

    Teraphysics Corporation is developing a 94 GHz, 25 W helical traveling wave tube (TWT) with 60% overall efficiency. The TWT includes several innovations including a reinvented helix geometry and fabrication that is compatible with lithographic, microfabrication techniques; a novel mechanical design where the electron gun, circuit and collector are fabricated simultaneously for alignment within two microns; and a novel, compact, periodic permanent magnet focusing configuration. The result is a compact device approximately 2.6” long, 1.9” in diameter, with weight of 1 lb, which will serve as Teraphysics' platform for future mm-wave and THz devices.

  • Self-assembled helical microstructures for millemeter-wave helical antennas

    New microfabrication techniques allow the creation of miniaturized antennas, including for use at frequencies well beyond 60 GHz. An advantage of using microfabrication is the ability to batch-process a large quantity of antennas, which can include electrically large arrays. We report the use of a unique micro-electro-mechanical systems (MEMS) fabrication process to make helical microstructures to be used as antennas after metallization. The fabrication process enables self-assembly of planar structures into three-dimensional structures during processing. Helices with different numbers of turns, handedness, and conductor widths are fabricated from spiral structures with the self-assembly. The layout, designing and fabrication method presented here allows fabrication of arrays or even multiple elements with different design parameters, on a physically small footprint.

  • Spatial power combining of Ka-band microfabricated TWTs based on a planar helix slow-wave structure

    Spatial power combining of two Ka-band microfabricated traveling wave tubes (TWTs) is reported. The TWTs are based on planar helix slow-wave structure with straight-edge connections (PH-SEC). Transition from a waveguide to the PH-SEC forms the basis for division of input power from a waveguide to the TWTs and for combining the output power into a waveguide. For a 3.7 KV and 10 mA beam, the PIC simulation results show that the output power can reach 13 W at 30GHz, with a calculated combining efficiency of 98%.

  • Optically driven microfluidic devices produced by two-photon microfabrication

    Optically driven microfluidic devices such as micropumps, microvalves and microtweezers have been developed by two-photon microfabrication. To improve the driving efficiency of the microfluidic devices, metalized micromachines driven by light have been developed by the combination of two-photon microfabrication and electroless plating. The optically controlled micro/nano fluidic devices will be used for low-cost, functional lab-on-a-chip.

  • Microfabricated, high power millimeter wave amplifiers at G-band

    We present the demonstration of the first traveling wave tube circuit fabricated using ultraviolet photolithography. The complete amplifier demonstrated over 60 W output power at 214.5 GHz with 15 GHz bandwidth in the small signal regime at 14 dB gain. A high-gain 233 GHz amplifier is now under development and predicted to reach over 100 W output power. We present several microfabrication advancements that will be utilized to create the new device.

  • Microfabrication techniques for millimeter-wave vacuum electronics

    The principal challenge for creating vacuum electron devices in the millimeter-wave (mmW) frequency range is accurate fabrication of slow-wave circuits and other electromagnetic features with tight tolerance. Ultraviolet Photolithography and Electroforming (UV-LIGA) techniques are presented that allow tight tolerance control for slow wave circuits for the mmW and sub-mmW bands. We show how these techniques were applied at the W- and G-bands.



Standards related to Microfabrication

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Jobs related to Microfabrication

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