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IEEE Transactions on Semiconductor Manufacturing

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Guest Editorial Special Section on the Advanced Semiconductor Manufacturing Conference

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Statistical methods for visual defect metrology

Defect detection algorithm for wafer inspection based on laser scanning

Improved EEPROM tunnel- and gate-oxide quality by integration of a low- temperature pre-tunnel-oxide RCA SC-1 clean

A Modified Lasso Model for Yield Analysis Considering the Interaction Effect in a Multistage Manufacturing Line

High yielding self-aligned contact process for a 0.150-/spl mu/m DRAM technology

Equipment Throughput Optimization by Means of Speed Loss Analysis

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L. Sattler

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B.I. Saeed

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