Conferences related to Acoustic Wave Devices

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2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)

The world's premiere conference in MEMS sensors, actuators and integrated micro and nano systems welcomes you to attend this four-day event showcasing major technological, scientific and commercial breakthroughs in mechanical, optical, chemical and biological devices and systems using micro and nanotechnology.The major areas of activity in the development of Transducers solicited and expected at this conference include but are not limited to: Bio, Medical, Chemical, and Micro Total Analysis Systems Fabrication and Packaging Mechanical and Physical Sensors Materials and Characterization Design, Simulation and Theory Actuators Optical MEMS RF MEMS Nanotechnology Energy and Power


2019 IEEE International Ultrasonics Symposium (IUS)

The conference covers all aspects of the technology associated with ultrasound generation and detection and their applications.


2019 IEEE SENSORS

The IEEE Sensors Conference is a forum for presentation, discussion, and exchange of state-of-the art information including the latest research and development in sensors and their related fields. It brings together researchers, developers, and practitioners from diverse fields including international scientists and engineers from academia, research institutes, and companies to present and discuss the latest results in the general field of sensors.

  • 2018 IEEE SENSORS

    The IEEE Sensors Conference is a forum for presentation, discussion, and exchange of state -of-the art information including the latest research and development in sensors and their relatedfields. It brings together researchers, developers, and practitioners from diverse fields includinginternational scientists and engineers from academia, research institutes, and companies topresent and discuss the latest results in the general field of sensors.

  • 2017 IEEE SENSORS

    The IEEE Sensors Conference is a forum for presentation, discussion, and exchange of state -of-the art information including the latest research and development in sensors and their relatedfields. It brings together researchers, developers, and practitioners from diverse fields includinginternational scientists and engineers from academia, research institutes, and companies topresent and discuss the latest results in the general field of sensors.

  • 2016 IEEE Sensors

    The IEEE Sensors Conference is a forum for presentation, discussion, and exchange of state -of-the art information including the latest research and development in sensors and their related fields. It brings together researchers, developers, and practitioners from diverse fields including international scientists and engineers from academia, research institutes, and companies to present and discuss the latest results in the general field of sensors.

  • 2015 IEEE Sensors

    The IEEE Sensors Conference is a forum for presentation, discussion, and exchange of state -of-the art information including the latest research and development in sensors and their related fields. It brings together researchers, developers, and practitioners from diverse fieldsincluding international scientists and engineers from academia, research institutes, and companies topresent and discuss the latest results in the general field of sensors.

  • 2014 IEEE Sensors

    The IEEE Sensors Conference is a forum for presentation, discussion, andexchange of state -of-the art information including the latest research and development in sensors andtheir related fields. It brings together researchers, developers, and practitioners from diverse fieldsincluding international scientists and engineers from academia, research institutes, and companies topresent and discuss the latest results in the general field of sensors.

  • 2013 IEEE Sensors

    The IEEE SENSORS Conference is a forum for presentation, discussion, and exchange of state -of-the art information including the latest research and development in sensors and their related fields. It brings together researchers, developers, and practitioners from diverse fields including international scientists and engineers from academia, research institutes, and companies to present and discuss the latest results in the general field of sensors.

  • 2012 IEEE Sensors

    The IEEE Sensors Conference is a forum for presentation, discussion, and exchange of state-of-the art information including the latest research and development in sensors and their related fields. It brings together researchers, developers, and practitioners from diverse fields including international scientists and engineers from academia, research institutes, and companies to present and discuss the latest results in the general field of sensors.

  • 2011 IEEE Sensors

    The IEEE Sensors Conference is a forum for presentation, discussion, and exchange of state-of-the art information including the latest research and development in sensors and their related fields. It brings together researchers, developers, and practitioners from diverse fields including international scientists and engineers from academia, research institutes, and companies to present and discuss the latest results in the general field of sensors. IEEE SENSORS 2011 will include keynote addresses by eminen

  • 2010 IEEE Sensors

    The IEEE SENSORS 2010 Conference is a forum for state-of-the-art presentations on sensors and related topics covering from theory to application, device to system, modeling to implementation and from macro/nano to scale.

  • 2009 IEEE Sensors

    IEEE Sensors Conference 2009 is intended to provide a common forum for researchers, scientists, engineers and practitioners throughout the world to present their latest research findings, ideas, developments and applications in the area of sensors and sensing technology. IEEE Sensors Conference 2009 will include keynote addresses by eminent scientists as well as special, regular and poster sessions.

  • 2008 IEEE Sensors

    IEEE SENSORS 2008 solicits original and state-of-the-art contributions to sensors and related topics, covering from theory to application, from device to system, from modeling to implementation, and from macro to micro/nano in scale. Topics of interest include,but are not limitid to: Phenomena, Modeling, and Evaluation (Novel Sensing Principles, Theory and Modeling, Sensors Characterization, Evaluation and Testing, Data Handling and Mining) Chemical and Gas Sensors (Materials, Devices, Electronics N

  • 2007 IEEE Sensors

    IEEE SENSORS 2007 solicits original and state-of-the-art contributions to sensors and related topics, covering from theory to application, from device to system, from modeling to implementation, and from macro to micro/nano in scale.

  • 2006 IEEE Sensors

  • 2005 IEEE Sensors

  • 2004 IEEE Sensors

  • 2003 IEEE Sensors

  • 2002 IEEE Sensors


2019 IEEE/MTT-S International Microwave Symposium - IMS 2019

Comprehensive symposium on microwave theory and techniques including active and passive circuit components, theory and microwave systems.

  • 2036 IEEE/MTT-S International Microwave Symposium - IMS 2036

    The IEEE International Microwave Symposium (IMS) is the world s foremost conference covering the UHF, RF, wireless, microwave, millimeter-wave, terahertz, and optical frequencies; encompassing everything from basic technologies to components to systems including the latest RFIC, MIC, MEMS and filter technologies, advances in CAD, modeling, EM simulation and more. The IMS includes technical and interactive sessions, exhibits, student competitions, panels, workshops, tutorials, and networking events.

  • 2031 IEEE/MTT-S International Microwave Symposium - IMS 2031

    The IEEE International Microwave Symposium (IMS) is the world s foremost conference covering the UHF, RF, wireless, microwave, millimeter-wave, terahertz, and optical frequencies; encompassing everything from basic technologies to components to systems including the latest RFIC, MIC, MEMS and filter technologies, advances in CAD, modeling, EM simulation and more. The IMS includes technical and interactive sessions, exhibits, student competitions, panels, workshops, tutorials, and networking events.

  • 2029 IEEE/MTT-S International Microwave Symposium - IMS 2029

    The IEEE International Microwave Symposium (IMS) is the world s foremost conference covering the UHF, RF, wireless, microwave, millimeter-wave, terahertz, and optical frequencies; encompassing everything from basic technologies to components to systems including the latest RFIC, MIC, MEMS and filter technologies, advances in CAD, modeling, EM simulation and more. The IMS includes technical and interactive sessions, exhibits, student competitions, panels, workshops, tutorials, and networking events.

  • 2026 IEEE/MTT-S International Microwave Symposium - IMS 2026

    The IEEE International Microwave Symposium (IMS) is the world s foremost conference covering the UHF, RF, wireless, microwave, millimeter-wave, terahertz, and optical frequencies; encompassing everything from basic technologies to components to systems including the latest RFIC, MIC, MEMS and filter technologies, advances in CAD, modeling, EM simulation and more. The IMS includes technical and interactive sessions, exhibits, student competitions, panels, workshops, tutorials, and networking events.

  • 2025 IEEE/MTT-S International Microwave Symposium - IMS 2025

    The IEEE International Microwave Symposium (IMS) is the world s foremost conferencecovering the UHF, RF, wireless, microwave, millimeter-wave, terahertz, and optical frequencies;encompassing everything from basic technologies to components to systems including thelatest RFIC, MIC, MEMS and filter technologies, advances in CAD, modeling, EM simulationand more. The IMS includes technical and interactive sessions, exhibits, student competitions,panels, workshops, tutorials, and networking events.

  • 2024 IEEE/MTT-S International Microwave Symposium - IMS 2024

    The IEEE International Microwave Symposium (IMS) is the world s foremost conference covering the UHF, RF, wireless, microwave, millimeter-wave, terahertz, and optical frequencies; encompassing everything from basic technologies to components to systems including the latest RFIC, MIC, MEMS and filter technologies, advances in CAD, modeling, EM simulation and more. The IMS includes technical and interactive sessions, exhibits, student competitions, panels, workshops, tutorials, and networking events.

  • 2023 IEEE/MTT-S International Microwave Symposium - IMS 2023

    The IEEE International Microwave Symposium (IMS) is the world s foremost conference covering the UHF, RF, wireless, microwave, millimeter-wave, terahertz, and optical frequencies; encompassing everything from basic technologies to components to systems including the latest RFIC, MIC, MEMS and filter technologies, advances in CAD, modeling, EM simulation and more. The IMS includes technical and interactive sessions, exhibits, student competitions, panels, workshops, tutorials, and networking events.

  • 2022 IEEE/MTT-S International Microwave Symposium - IMS 2022

    The IEEE International Microwave Symposium (IMS) is the world s foremost conference covering the UHF, RF, wireless, microwave, millimeter-wave, terahertz, and optical frequencies; encompassing everything from basic technologies to components to systems including the latest RFIC, MIC, MEMS and filter technologies, advances in CAD, modeling, EM simulation and more. The IMS includes technical and interactive sessions, exhibits, student competitions, panels, workshops, tutorials, and networking events.

  • 2021 IEEE/MTT-S International Microwave Symposium - IMS 2021

    The IEEE MTT-S International Microwave Symposium (IMS) is the premier conference covering basic technologies, to passives and actives components to system over a wide range of frequencies including VHF, UHF, RF, microwave, millimeter-wave, terahertz, and optical. The conference will encompass the latest in RFIC, MIC, MEMS and filter technologies, advances in CAD, modeling, EM simulation, wireless systems, RFID and related topics.

  • 2020 IEEE/MTT-S International Microwave Symposium (IMS)

    The IEEE International Microwave Symposium (IMS) is the world s foremost conference covering the UHF, RF, wireless, microwave, millimeter-wave, terahertz, and optical frequencies; encompassing everything from basic technologies to components to systems including the latest RFIC, MIC, MEMS and filter technologies, advances in CAD, modeling, EM simulation and more. The IMS includes technical and interactive sessions, exhibits, student competitions, panels, workshops, tutorials, and networking events.

  • 2018 IEEE/MTT-S International Microwave Symposium - IMS 2018

    Microwave theory and techniques, RF/microwave/millimeter-wave/terahertz circuit design and fabrication technology, radio/wireless communication.

  • 2017 IEEE/MTT-S International Microwave Symposium - IMS 2017

    The IEEE MTT-S International Microwave Symposium (IMS) is the premier conference covering basic technologies, to passives and actives components to system over a wide range of frequencies including VHF, UHF, RF, microwave, millimeter-wave, terahertz, and optical. The conference will encompass the latest in RFIC, MIC, MEMS and filter technologies, advances in CAD, modeling, EM simulation, wireless systems, RFID and related topics.

  • 2016 IEEE/MTT-S International Microwave Symposium - IMS 2016

    The IEEE International Microwave Symposium (IMS) is the world s foremost conference covering the UHF, RF, wireless, microwave, millimeter-wave, terahertz, and optical frequencies; encompassing everything from basic technologies to components to systems including the latest RFIC, MIC, MEMS and filter technologies, advances in CAD, modeling, EM simulation and more. The IMS includes technical and interactive sessions, exhibits, student competitions, panels, workshops, tutorials, and networking events.

  • 2015 IEEE/MTT-S International Microwave Symposium - MTT 2015

    The IEEE MTT-S International Microwave Symposium (IMS) is the premier conference covering basic technologies, to passives and actives components to system over a wide range of frequencies including VHF, UHF, RF, microwave, millimeter-wave, terahertz, and optical. The conference will encompass the latest in RFIC, MIC, MEMS and filter technologies, advances in CAD, modeling, EM simulation, wireless systems, RFID and related topics. The IMS includes technical sessions, both oral and interactive, worksh

  • 2014 IEEE/MTT-S International Microwave Symposium - MTT 2014

    IMS2014 will cover developments in microwave technology from nano devices to system applications. Technical paper sessions, interactive forums, plenary and panel sessions, workshops, short courses, industrial exhibits, and a wide array of other technical activities will be offered.

  • 2013 IEEE/MTT-S International Microwave Symposium - MTT 2013

    The IEEE MTT-S International Microwave Symposium (IMS) is the premier conference covering basic technologies, to passives and actives components to system over a wide range of frequencies including VHF, UHF, RF, microwave, millimeter -wave, terahertz, and optical. The conference will encompass the latest in RFIC, MIC, MEMS and filter technologies, advances in CAD, modeling, EM simulation, wireless systems, RFID and related topics.The IMS includes technical and interactive sessions, exhibits, student competitions, panels, workshops, tutorials, and networking events.

  • 2012 IEEE/MTT-S International Microwave Symposium - MTT 2012

    The IEEE International Microwave Symposium (IMS) is the world s foremost conference covering the UHF, RF, wireless, microwave, millimeter-wave, terahertz, and optical frequencies; encompassing everything from basic technologies to components to systems including the latest RFIC, MIC, MEMS and filter technologies, advances in CAD, modeling, EM simulation and more. The IMS includes technical and interactive sessions, exhibits, student competitions, panels, workshops, tutorials, and networking events.

  • 2011 IEEE/MTT-S International Microwave Symposium - MTT 2011

    The IEEE International Microwave Symposium (IMS) is the world s foremost conference covering the UHF, RF, wireless, microwave, millimeter-wave, terahertz, and optical frequencies; encompassing everything from basic technologies to components to systems including the latest RFIC, MIC, MEMS and filter technologies, advances in CAD, modeling, EM simulation and more. The IMS includes technical and interactive sessions, exhibits, student competitions, panels, workshops, tutorials, and networking events.

  • 2010 IEEE/MTT-S International Microwave Symposium - MTT 2010

    Reports of research and development at the state-of-the-art of the theory and techniques related to the technology and applications of devices, components, circuits, modules and systems in the RF, microwave, millimeter-wave, submillimeter-wave and Terahertz ranges of the electromagnetic spectrum.

  • 2009 IEEE/MTT-S International Microwave Symposium - MTT 2009

    The IEEE International Microwave Symposium (IMS) is the world s foremost conference covering the UHF, RF, wireless, microwave, millimeter-wave, terahertz, and optical frequencies; encompassing everything from basic technologies to components to systems including the latest RFIC, MIC, MEMS and filter technologies, advances in CAD, modeling, EM simulation and more. The IMS includes technical and interactive sessions, exhibits, student competitions, panels, workshops, tutorials, and networking events.

  • 2008 IEEE/MTT-S International Microwave Symposium - MTT 2008

  • 2007 IEEE/MTT-S International Microwave Symposium - MTT 2007

  • 2006 IEEE/MTT-S International Microwave Symposium - MTT 2006

  • 2005 IEEE/MTT-S International Microwave Symposium - MTT 2005

  • 2004 IEEE/MTT-S International Microwave Symposium - MTT 2004

  • 2003 IEEE/MTT-S International Microwave Symposium - MTT 2003

  • 2002 IEEE/MTT-S International Microwave Symposium - MTT 2002

  • 2001 IEEE/MTT-S International Microwave Symposium - MTT 2001

  • 2000 IEEE/MTT-S International Microwave Symposium - MTT 2000

  • 1999 IEEE/MTT-S International Microwave Symposium - MTT '99

  • 1998 IEEE/MTT-S International Microwave Symposium - MTT '98

  • 1997 IEEE/MTT-S International Microwave Symposium - MTT '97

  • 1996 IEEE/MTT-S International Microwave Symposium - MTT '96


2019 Joint Conference of the IEEE International Frequency Control Symposium anEuropean Frequency and Time Forum (EFTF/IFC)

The 33RD European Frequency and Time Forum and the 73rd consecutive meeting of the IEEE International Frequency Control Symposium will be held as a joint conference in Orlando, Florida, USA April 14-18, 2019. The conference will provide information on recent advances and trends on scientific research, development and manufacturing technology in the area of frequency and time and frequency control. A technical exhibition will be held during the conference, which will be hosted at the Caribe Royale Hotel and Convention Center.


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Periodicals related to Acoustic Wave Devices

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Antennas and Wireless Propagation Letters, IEEE

IEEE Antennas and Wireless Propagation Letters (AWP Letters) will be devoted to the rapid electronic publication of short manuscripts in the technical areas of Antennas and Wireless Propagation.


Communications, IEEE Transactions on

Telephone, telegraphy, facsimile, and point-to-point television, by electromagnetic propagation, including radio; wire; aerial, underground, coaxial, and submarine cables; waveguides, communication satellites, and lasers; in marine, aeronautical, space and fixed station services; repeaters, radio relaying, signal storage, and regeneration; telecommunication error detection and correction; multiplexing and carrier techniques; communication switching systems; data communications; and communication theory. In addition to the above, ...


Consumer Electronics, IEEE Transactions on

The design and manufacture of consumer electronics products, components, and related activities, particularly those used for entertainment, leisure, and educational purposes


Device and Materials Reliability, IEEE Transactions on

Provides leading edge information that is critical to the creation of reliable electronic devices and materials, and a focus for interdisciplinary communication in the state of the art of reliability of electronic devices, and the materials used in their manufacture. It focuses on the reliability of electronic, optical, and magnetic devices, and microsystems; the materials and processes used in the ...


Dielectrics and Electrical Insulation, IEEE Transactions on

Electrical insulation common to the design and construction of components and equipment for use in electric and electronic circuits and distribution systems at all frequencies.


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Most published Xplore authors for Acoustic Wave Devices

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Xplore Articles related to Acoustic Wave Devices

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Microparticle manipulation using dual-wavelength surface acoustic wave devices

2017 IEEE International Ultrasonics Symposium (IUS), 2017

Recently, contactless manipulation of immersed objects has garnered great interest. Specifically, acoustic manipulation in microfluidic channels has emerged as a tool to control micron-sized objects in chemical, medical, and biological applications. Pure and controllable acoustic forces of the acoustic manipulation method exhibit a minor negative impact on viability and functionality of biological cells. A trend in acoustic manipulation methods involves ...


Modeling of multilayered acoustic wave devices with the method of reverberation-ray matrix

2008 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications, 2008

The method of reverberation-ray matrix (MRRM) are modified and extended to the analysis of wave propagation in multilayered acoustic wave devices based on three-dimensional linear piezoelectricity. By the plane wave solution assumption, state equations are established whose solutions are expressed with unknown wave amplitudes. Within the framework of MRRM, the phase and scattering relations are properly set up to determine ...


A study on elastic energy distribution in layered structures for application to surface acoustic wave devices

1994 Proceedings of IEEE Ultrasonics Symposium, 1994

The relative fraction r of the elastic energy of an acoustic mode localized in a supported film is shown to play an important role in some applications of layered structures such as electroelastic effect, gas sensing and acoustic characterization. Computer simulation of the parameter r as a function of the film thickness normalized to the acoustic wavelength is performed for ...


Production issues in using Silicon Dioxide films for temperature compensated Bulk and Surface Acoustic Wave devices

2012 IEEE International Frequency Control Symposium Proceedings, 2012

In this paper, production oriented aspects of using Silicon Dioxide (SiO<sub>2</sub>) films in manufacturing of Temperature Compensated Bulk Acoustic Wave (BAW)/ Film Bulk Acoustic Resonator (FBAR) [1], [2] and Surface Acoustic Wave (SAW) devices have been presented. SiO<sub>2</sub> has been used to obtain low Temperature Coefficient (TempCo) in acoustic wave devices for more than three decades [3]. One of the ...


Application of fluorinated copolyimides on surface acoustic wave devices

1993 Proceedings IEEE Ultrasonics Symposium, 1993

This paper presents the effectiveness and problems of fluorinated polyimides for SAW device applications such as passivation, frequency trimming, spurious wave dumping, interlayer dielectrics and acousto-optic integration. We have shown basic experimental results for device processes and some application results such as frequency trimming, formation of passive circuit elements, and multilayered devices


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Educational Resources on Acoustic Wave Devices

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IEEE.tv Videos

Single Crystal AlGaN Bulk Acoustic Wave Resonators on Silicon Substrates with High Electromechanical Coupling: RFIC Industry Showcase
Millimeter Wave Mobile Communications for 5G Cellular: It Will Work!
IEEE Magnetics Distinguished Lecture - Mitsuteru Inoue
Brooklyn 5G Summit 2014: Unleashing Millimeter-Wave Frequency by Andreas Roessler
Part 3: Workshop on Benchmarking Quantum Computational Devices and Systems - ICRC 2018
2011 IEEE Awards Edison Medal - Isamu Akasaki
Yamaha's Avant Grand Digital Piano Mimics Acoustic
From THz imaging to millimeter-wave stimulation of neurons: Is there a killer application for high frequency RF in the medical community? (RFIC 2015 Keynote)
IEEE Magnetics Distinguished Lecture - Alison B. Flatau
Part 1: Workshop on Benchmarking Quantum Computational Devices & Systems - ICRC 2018
Microapps: Enabling Optimized Performance and Lower TCO (Total Cost of Ownership) with Infineon mm-Wave Transceiver
Solving Sparse Representation for Image Classification using Quantum D-Wave 2X Machine - IEEE Rebooting Computing 2017
IMS 2014:Active 600GHz Frequency Multiplier-by-Six S-MMICs for Submillimeter-Wave Generation
IMS 2014:Flip Chip Assembly for Sub-millimeter Wave Amplifier MMIC on Polyimide Substrate
Brooklyn 5G - 2015 - Michael Ha - Expanding Use of the Millimeter Wave Spectrum with 5G
Millimeter-Wave Bandpass Filter Using High-Q Conical Inductors and MOM Capacitors: RFIC Interactive Forum
Brooklyn 5G Summit: Going the Distance with CMOs: mm-Waves and Beyond
5g Cellular: It Will Work!
IMS 2011 Microapps - Volume Manufacturing Trends for Automotive Radar Devices
IMS 2012 Special Sessions: The Evolution of Some Key Active and Passive Microwave Components - Richard True

IEEE-USA E-Books

  • Microparticle manipulation using dual-wavelength surface acoustic wave devices

    Recently, contactless manipulation of immersed objects has garnered great interest. Specifically, acoustic manipulation in microfluidic channels has emerged as a tool to control micron-sized objects in chemical, medical, and biological applications. Pure and controllable acoustic forces of the acoustic manipulation method exhibit a minor negative impact on viability and functionality of biological cells. A trend in acoustic manipulation methods involves creating a standing acoustic-wave field across a microfluidic channel and employing the resulting acoustic pressure field to trap, separate, pattern, or sort microparticles or bio-cells suspended in microfluids. Various types of acoustic-wave modes were utilized to produce desired acoustic-wave fields including ultrasonic bulk acoustic waves (BAWs), surface acoustic waves (SAWs), and Lamb waves. With respect to the design of tunable, efficient, and reproducible devices, increasing attention has been focused on SAW-based microfluidic devices.

  • Modeling of multilayered acoustic wave devices with the method of reverberation-ray matrix

    The method of reverberation-ray matrix (MRRM) are modified and extended to the analysis of wave propagation in multilayered acoustic wave devices based on three-dimensional linear piezoelectricity. By the plane wave solution assumption, state equations are established whose solutions are expressed with unknown wave amplitudes. Within the framework of MRRM, the phase and scattering relations are properly set up to determine the unknowns without involving exponentially growing functions and matrix inversion operations in an easy and uniform way. Thus the present MRRM is unconditionally stable and free from limitations to the frequency, the thickness of individual layers and the total number of layers. The surface waves, the interface waves and the bulk waves are all included in the formulation. Therefore, the present formulation applies to SAW devices as well as BAW devices. Numerical examples are given to illustrate the well performance of the proposed formulation of MRRM for the analysis of free waves in multilayered acoustic wave devices.

  • A study on elastic energy distribution in layered structures for application to surface acoustic wave devices

    The relative fraction r of the elastic energy of an acoustic mode localized in a supported film is shown to play an important role in some applications of layered structures such as electroelastic effect, gas sensing and acoustic characterization. Computer simulation of the parameter r as a function of the film thickness normalized to the acoustic wavelength is performed for different possible material combinations in accordance with Farnell-Adler's scheme. Some general features of the parameter r are discussed. Measurements of acoustic attenuation and temperature coefficient of delay, are shown to correlate with the behavior of this parameter for Rayleigh and Sezawa modes and for both conditions of slow film on fast substrate and fast film on slow substrate. The analysis and experiments have been carried out on layered structures made of AlN and ZnO films on glass, fused quartz, and Si substrates

  • Production issues in using Silicon Dioxide films for temperature compensated Bulk and Surface Acoustic Wave devices

    In this paper, production oriented aspects of using Silicon Dioxide (SiO<sub>2</sub>) films in manufacturing of Temperature Compensated Bulk Acoustic Wave (BAW)/ Film Bulk Acoustic Resonator (FBAR) [1], [2] and Surface Acoustic Wave (SAW) devices have been presented. SiO<sub>2</sub> has been used to obtain low Temperature Coefficient (TempCo) in acoustic wave devices for more than three decades [3]. One of the big issues is that depending on the method of deposition and the amount of times SiO<sub>2</sub> is exposed to the ambient environment [4], it can significantly alter temperature compensating properties of the film as well as etch rate in a thickness trimming process with focused Ion Beam. Plasma Enhanced Chemical Vapor Deposition (PECVD), RF diode and RF magnetron depositions with in-situ thickness trimming and capping layers were tested on the temperature compensated FBAR and SAW structures. Repeatability of the results was tested with different amount of time before processing steps. Best results were obtained using RF diode sputtered SiO<sub>2</sub> with in-situ trimming process [5] and in-situ aluminum nitride (AlN) sputtered capping layer.

  • Application of fluorinated copolyimides on surface acoustic wave devices

    This paper presents the effectiveness and problems of fluorinated polyimides for SAW device applications such as passivation, frequency trimming, spurious wave dumping, interlayer dielectrics and acousto-optic integration. We have shown basic experimental results for device processes and some application results such as frequency trimming, formation of passive circuit elements, and multilayered devices

  • Solving Three Key Problems of Wavelet Transform Processor Using Surface Acoustic Wave Devices

    Abstract-In this paper, we present the bulk acoustic wave (BAW), the sound- electricity reclamation (SER), and the insertion loss as the three key problems of a wavelet transform processor using surface acoustic wave devices. The solutions to these problems are achieved in this study. The more the number of electrode pairs for the interdigital transducer (IDT) is, the weaker the excited BAW is, so the BAW can be eliminated when the number of electrode pairs for IDT is large enough. The substrate material of a small electromechanical coupling coefficient (ECC) k2and the low-impedance load of IDT can eliminate SER. When the output ends of the wavelet transform processors are respectively connected to the amplifiers, their insertion losses can be compensated. X-112oY LiTaO3(small ECC k2) is used as a substrate material to fabricate the wavelet transform processor.

  • Influence of internal stress surface distribution on accuracy of surface acoustic wave devices

    In this paper influence of internal stress surface distribution on accuracy of surface acoustic wave devices is described. Analytical study of influence is proposed. Fields of application of this study are described.

  • Focus adjustment system for a fast-scanning and phase-sensitive laser probe for radio frequency surface and bulk acoustic wave devices

    This paper describes a focus adjustment system particularly designed for the fast-mechanical-scanning and phase-sensitive laser probe for radio frequency (RF) surface and bulk acoustic wave (SAW/BAW) devices. When high spatial resolution is necessary for the observation, one needs an objective lens of large magnifying power with extremely shallow focal depth. Then a tiny inclination of a measurement device may cause severe defocus resulting in blurred images. We installed the focus adjustment system in the laser probe, and showed that even there is the inclination, high quality information of the wave field can be acquired without slowing down the scanning speed. The laser probe with the focus adjustment function is applied to the characterization of RF SAW devices operated in 2 GHz range. It is shown the spatial resolution better than 0.5 mum is obtainable.

  • Imaging of the wave field of surface acoustic wave devices

    An optical measurement technique for the phase preserving imaging of elastical wave fields of surface acoustic wave devices was developed. This technique uses short pulses from a mode-locked picosecond laser, harmonic mixing, and coherent detection to achieve a measurement bandwidth beyond 1 GHz. It is therefore well suited to perform measurements on surface acoustic wave devices of even the highest frequencies where modeling becomes increasingly difficult. The detection capability for surface displacements of 1 pm/ square root Hz allows a minimum dynamic range of about 40 dB for the determination of amplitude profiles of surface acoustic wave devices. As an example of a practical application, results of measurements on a bandpass filter are presented. The generated wave profiles have been determined at several different distances from the transducer both in the passband and in the stopband of the device. The measurements are in excellent agreement with computer simulations obtained with an angular spectrum of waves model.<<ETX>>

  • Technical trends and future evolution of surface acoustic wave devices

    The pulse compression system for military use adopted a surface acoustic wave device as a dispersive delay line. The devices have been confirmed as essential electrical components after great success in TV-IF filters. Many applications, such as various filters and resonators for CB radios, FM radios, mobile radios, satellite broadcasting equipment in consumer electronics and telecommunications, have been widely developed for practical use. Multimedia, supported globally by fusion of computers, consumer electronics and telecommunication technology, is just beginning at present. The importance of surface acoustic wave devices is increasing as the components meet the needs of high-frequency, high-performance, more functional and down-sized equipment. This paper describes the progress schedule and the details of the FPLMTS (Future Public Land Mobile Telecommunication Systems) in Japan, and reviews the technical trends of the low-loss and the high-frequency surface acoustic wave devices, and then clarifies the demands in the systems for the devices.



Standards related to Acoustic Wave Devices

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Jobs related to Acoustic Wave Devices

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